A. K. Akhmedov, A. Sh. Asvarov, A. E. Muslimov, V. M. Kanevsky
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引用次数: 0
Abstract
A comparative study of the growth process of transparent conductive films based on Ga-doped ZnO is carried out during the magnetron sputtering of a traditional ZnO:Ga ceramic target and ZnO:Ga–Zn composite targets with a Zn metal phase content of 10 to 30 wt %. The influence of the composition of composite targets and substrate temperature on the functional characteristics and microstructure of transparent conductive films is studied. It is demonstrated that an increase in the zinc content in the composition of the composite target when the substrate is heated to 200°C and above helps to improve the structural perfection of ZnO:Ga films and reduce their resistivity due to an increase in the concentration of charge carriers against the background of a high value of Hall mobility. All ZnO:Ga films obtained by sputtering composite targets at a substrate temperature of 200°C and above demonstrate high optical transmittance in the visible region.
期刊介绍：
Nanobiotechnology Reports publishes interdisciplinary research articles on fundamental aspects of the structure and properties of nanoscale objects and nanomaterials, polymeric and bioorganic molecules, and supramolecular and biohybrid complexes, as well as articles that discuss technologies for their preparation and processing, and practical implementation of products, devices, and nature-like systems based on them. The journal publishes original articles and reviews that meet the highest scientific quality standards in the following areas of science and technology studies: self-organizing structures and nanoassemblies; nanostructures, including nanotubes; functional and structural nanomaterials; polymeric, bioorganic, and hybrid nanomaterials; devices and products based on nanomaterials and nanotechnology; nanobiology and genetics, and omics technologies; nanobiomedicine and nanopharmaceutics; nanoelectronics and neuromorphic computing systems; neurocognitive systems and technologies; nanophotonics; natural science methods in a study of cultural heritage items; metrology, standardization, and monitoring in nanotechnology.
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