Influence of W contents on the microstructure and tribological properties of W-DLC coatings deposited by PECVD combined with magnetron sputtering

IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Vacuum Pub Date : 2024-08-01 Epub Date: 2024-05-15 DOI:10.1016/j.vacuum.2024.113293
Xingguo Feng, Shengzhu Cao, Yugang Zheng, Ying He, Keliang Wang, Kaifeng Zhang, Hui Zhou
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Abstract

In the field of industrial applications, reasonable selection of frictional counterparts is pivotal for reducing friction and wear. To interpret the tribological behavior of W-DLC films when interfacing with themselves and 9Cr18 steel, W-DLC coatings of varying W content were applied using sputtering of a WC target in a combined Ar and C2H2 atmosphere. The findings reveal that the sp3 content elevates as the WC target power intensifies, peaking at 52.5 at.% with a WC target power of 2 kW. Beyond this point, a further increase in power results in a decline of sp3 content. When W-DLC coatings of different W content are pitted against a 9Cr18 ball, the W-DLC coating with a composition of 19.4 at.% W content exhibits a notably lower friction coefficient and minimized wear rate. The tribological results for W-DLC coatings interfacing with a W-DLC coated 9Cr18 ball surpass those of an uncoated 9Cr18 ball. Moreover, the wear rates for W-DLC coatings with reduced W content, when tested against the W-DLC coated 9Cr18 ball, reduce by more than twice as compared to their performance against an uncoated 9Cr18 ball. This suggests that the transfer layer effect is subdued when W-DLC coatings interface with a W-DLC counterpart. Here, the surface texture and resilience of the coatings assume a significant role. Coatings with resilience and smoother surfaces exhibit enhanced wear resistance. A reduced difference in hardness between the W-DLC coated disc and the 9Cr18 ball makes it prone to pronounced wear. This highlights the notion that the concurrent application of similar W-DLC coatings on both the disc and ball marginally enhances wear resistance.

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W 含量对通过 PECVD 结合磁控溅射沉积的 W-DLC 涂层微观结构和摩擦学特性的影响
在工业应用领域,合理选择摩擦对应物对于减少摩擦和磨损至关重要。为了解释 W-DLC 薄膜在与自身和 9Cr18 钢接触时的摩擦学行为,我们在 Ar 和 C2H2 复合气氛中使用 WC 靶件溅射法镀上了不同 W 含量的 W-DLC 涂层。研究结果表明,随着 WC 靶件功率的增加,sp3 含量也随之增加,当 WC 靶件功率为 2 kW 时,sp3 含量达到峰值 52.5%。超过此点后,功率进一步增加会导致 sp3 含量下降。当不同 W 含量的 W-DLC 涂层与 9Cr18 钢球摩擦时,W 含量为 19.4% 的 W-DLC 涂层的摩擦系数明显较低,磨损率也最小。W-DLC 涂层与涂有 W-DLC 涂层的 9Cr18 钢球的摩擦学结果超过了未涂有 W-DLC 涂层的 9Cr18 钢球。此外,在对涂有 W-DLC 涂层的 9Cr18 钢球进行测试时,减少 W 含量的 W-DLC 涂层的磨损率比对未涂覆的 9Cr18 钢球的磨损率降低了两倍多。这表明,当 W-DLC 涂层与 W-DLC 涂层对接时,转移层效应会受到抑制。在这方面,涂层的表面纹理和回弹性起着重要作用。具有回弹性且表面更光滑的涂层具有更强的耐磨性。涂有 W-DLC 涂层的圆盘与 9Cr18 钢球之间的硬度差减小,使其容易受到明显磨损。这突出表明,同时在圆盘和钢球上涂覆类似的 W-DLC 涂层可略微增强耐磨性。
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来源期刊
Vacuum
Vacuum 工程技术-材料科学:综合
CiteScore
6.80
自引率
17.50%
发文量
0
审稿时长
34 days
期刊介绍: Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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