Yu Han , Wei Chen , Teng Jiao , Han Yu , Zhao Zhang , Xin Dong , Yuantao Zhang , Baolin Zhang
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引用次数: 0
Abstract
In this paper, the Ga2O3 films were grown on Si/SiO2 template by MOCVD and the effects of the growth temperature on the film's properties were investigated. The films transitioned from an amorphous phase to a polycrystalline β-Ga2O3 phase as the growth temperature increased. The bonding state of oxygen in the films was investigated. Based on the measured optical parameters of amorphous Ga2O3 films and optical simulation calculation, optical waveguide structures were designed and fabricated. The characteristics of the waveguide were consistent with the design. The 2.5-μm-wide, 310-nm-high Ga2O3 waveguide achieved an optical loss of 12.4 dB/cm at 1550 nm using the truncation method. This study demonstrated that amorphous Ga2O3 films grown by the MOCVD have great potential for waveguide fabrication.
期刊介绍：
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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