Mid-spatial frequency error restraint based on variable optimal angle-step trajectory strategy for the removal attenuation effect of magnetorheological finishing

IF 3.7 3区 材料科学 Q1 INSTRUMENTS & INSTRUMENTATION Smart Materials and Structures Pub Date : 2024-08-07 DOI:10.1088/1361-665x/ad695f
Lisheng Cai, Kuo Hai, Zisheng Li, Wei Fan, Xing Su, Liangwei Li, Ming Yan, Jinbo Li and Wen Huang
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Abstract

In the field of ultra-precision manufacturing, such as lithography lenses, achieving nanometer-level errors across the entire frequency range is crucial. Magnetorheological finishing (MRF) technology, a high-precision processing method with high efficiency and low subsurface damage, often introduces mid-spatial frequency (MSF) error due to the removal attenuation effect and regular polishing trajectory in the long continuous polishing process. It causes various imaging and light transmission defects that limit the performance of precision optical instruments. The attenuation of material removal capacity of MRF is characterized by the attenuation of the tool influence function, which is obtained by an equal time interval point removal experiment. The variable optimal angle-step trajectory strategy is proposed to mitigate the removal attenuation effect of MRF and suppress MSF error. To validate the effectiveness and practicability of the proposed method, a uniform polishing experiment is performed on fused silica components. The experimental results show that the 90° grating trajectory introduces significant MSF error on surface shape with PV = 0.008 λ, and the variable optimal angle-step trajectory strategy does not introduce MSF error, which confirms the variable optimal angle-step trajectory strategy effectively eliminates the removal attenuation effect of MRF and suppresses MSF error. The study presents a general approach for ultra-precision optical processing and improves the manufacturing accuracy of optical components.
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基于可变最优角度步进轨迹策略的中空间频率误差约束,用于消除磁流变涂饰的衰减效应
在光刻透镜等超精密制造领域,在整个频率范围内实现纳米级误差至关重要。磁流变精加工(MRF)技术是一种具有高效率和低表面下损伤的高精度加工方法,但在长时间的连续抛光过程中,由于去除衰减效应和规则的抛光轨迹,往往会引入中空间频率(MSF)误差。这会造成各种成像和透光缺陷,限制精密光学仪器的性能。MRF 的材料去除能力衰减以刀具影响函数衰减为特征,通过等时间间隔点去除实验得到。提出了可变最佳角度步进轨迹策略,以减轻 MRF 的去除衰减效应并抑制 MSF 误差。为了验证所提方法的有效性和实用性,对熔融石英部件进行了均匀抛光实验。实验结果表明,90° 光栅轨迹会对 PV = 0.008 λ 的表面形状带来显著的 MSF 误差,而可变最佳角度步进轨迹策略不会带来 MSF 误差,这证实了可变最佳角度步进轨迹策略能有效消除 MRF 的去除衰减效应并抑制 MSF 误差。该研究为超精密光学加工提供了一种通用方法,提高了光学元件的制造精度。
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来源期刊
Smart Materials and Structures
Smart Materials and Structures 工程技术-材料科学:综合
CiteScore
7.50
自引率
12.20%
发文量
317
审稿时长
3 months
期刊介绍: Smart Materials and Structures (SMS) is a multi-disciplinary engineering journal that explores the creation and utilization of novel forms of transduction. It is a leading journal in the area of smart materials and structures, publishing the most important results from different regions of the world, largely from Asia, Europe and North America. The results may be as disparate as the development of new materials and active composite systems, derived using theoretical predictions to complex structural systems, which generate new capabilities by incorporating enabling new smart material transducers. The theoretical predictions are usually accompanied with experimental verification, characterizing the performance of new structures and devices. These systems are examined from the nanoscale to the macroscopic. SMS has a Board of Associate Editors who are specialists in a multitude of areas, ensuring that reviews are fast, fair and performed by experts in all sub-disciplines of smart materials, systems and structures. A smart material is defined as any material that is capable of being controlled such that its response and properties change under a stimulus. A smart structure or system is capable of reacting to stimuli or the environment in a prescribed manner. SMS is committed to understanding, expanding and dissemination of knowledge in this subject matter.
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