Mid-spatial frequency error restraint based on variable optimal angle-step trajectory strategy for the removal attenuation effect of magnetorheological finishing
Lisheng Cai, Kuo Hai, Zisheng Li, Wei Fan, Xing Su, Liangwei Li, Ming Yan, Jinbo Li and Wen Huang
{"title":"Mid-spatial frequency error restraint based on variable optimal angle-step trajectory strategy for the removal attenuation effect of magnetorheological finishing","authors":"Lisheng Cai, Kuo Hai, Zisheng Li, Wei Fan, Xing Su, Liangwei Li, Ming Yan, Jinbo Li and Wen Huang","doi":"10.1088/1361-665x/ad695f","DOIUrl":null,"url":null,"abstract":"In the field of ultra-precision manufacturing, such as lithography lenses, achieving nanometer-level errors across the entire frequency range is crucial. Magnetorheological finishing (MRF) technology, a high-precision processing method with high efficiency and low subsurface damage, often introduces mid-spatial frequency (MSF) error due to the removal attenuation effect and regular polishing trajectory in the long continuous polishing process. It causes various imaging and light transmission defects that limit the performance of precision optical instruments. The attenuation of material removal capacity of MRF is characterized by the attenuation of the tool influence function, which is obtained by an equal time interval point removal experiment. The variable optimal angle-step trajectory strategy is proposed to mitigate the removal attenuation effect of MRF and suppress MSF error. To validate the effectiveness and practicability of the proposed method, a uniform polishing experiment is performed on fused silica components. The experimental results show that the 90° grating trajectory introduces significant MSF error on surface shape with PV = 0.008 λ, and the variable optimal angle-step trajectory strategy does not introduce MSF error, which confirms the variable optimal angle-step trajectory strategy effectively eliminates the removal attenuation effect of MRF and suppresses MSF error. The study presents a general approach for ultra-precision optical processing and improves the manufacturing accuracy of optical components.","PeriodicalId":21656,"journal":{"name":"Smart Materials and Structures","volume":null,"pages":null},"PeriodicalIF":3.7000,"publicationDate":"2024-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Smart Materials and Structures","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1088/1361-665x/ad695f","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0
Abstract
In the field of ultra-precision manufacturing, such as lithography lenses, achieving nanometer-level errors across the entire frequency range is crucial. Magnetorheological finishing (MRF) technology, a high-precision processing method with high efficiency and low subsurface damage, often introduces mid-spatial frequency (MSF) error due to the removal attenuation effect and regular polishing trajectory in the long continuous polishing process. It causes various imaging and light transmission defects that limit the performance of precision optical instruments. The attenuation of material removal capacity of MRF is characterized by the attenuation of the tool influence function, which is obtained by an equal time interval point removal experiment. The variable optimal angle-step trajectory strategy is proposed to mitigate the removal attenuation effect of MRF and suppress MSF error. To validate the effectiveness and practicability of the proposed method, a uniform polishing experiment is performed on fused silica components. The experimental results show that the 90° grating trajectory introduces significant MSF error on surface shape with PV = 0.008 λ, and the variable optimal angle-step trajectory strategy does not introduce MSF error, which confirms the variable optimal angle-step trajectory strategy effectively eliminates the removal attenuation effect of MRF and suppresses MSF error. The study presents a general approach for ultra-precision optical processing and improves the manufacturing accuracy of optical components.
期刊介绍:
Smart Materials and Structures (SMS) is a multi-disciplinary engineering journal that explores the creation and utilization of novel forms of transduction. It is a leading journal in the area of smart materials and structures, publishing the most important results from different regions of the world, largely from Asia, Europe and North America. The results may be as disparate as the development of new materials and active composite systems, derived using theoretical predictions to complex structural systems, which generate new capabilities by incorporating enabling new smart material transducers. The theoretical predictions are usually accompanied with experimental verification, characterizing the performance of new structures and devices. These systems are examined from the nanoscale to the macroscopic. SMS has a Board of Associate Editors who are specialists in a multitude of areas, ensuring that reviews are fast, fair and performed by experts in all sub-disciplines of smart materials, systems and structures.
A smart material is defined as any material that is capable of being controlled such that its response and properties change under a stimulus. A smart structure or system is capable of reacting to stimuli or the environment in a prescribed manner. SMS is committed to understanding, expanding and dissemination of knowledge in this subject matter.