Modeling and compensation of a hollow XY stage based on hybrid reluctance actuators

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Sensors and Actuators A-physical Pub Date : 2024-09-05 DOI:10.1016/j.sna.2024.115874

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Abstract

In the field of beam pointing and optoelectronic imaging, there is a growing demand for control mechanisms that offer large stroke, and high bandwidth. These are precisely the characteristics of hybrid reluctance actuator, which therefore is increasingly being used in XY stage to replace piezo-actuator and voice coil motor. This study presents a hollow XY stage utilizing hybrid resistance actuators, aiming to adapt to optical applications with inherent nonlinearity and biaxial coupling, which are further modeled and compensated to mitigate their impacts. Firstly, the basic composition and working principle of the hollow XY stage are described, and the impact of its nonlinearity and biaxial coupling characteristics is elucidated. Secondly, the sources of nonlinearity and biaxial coupling are analyzed, and an analytical model of hybrid reluctance actuators is established. The magnetic leakage coefficient of the model is determined, and the accuracy of the model is verified by Finite Element Method (FEM) and experiment, demonstrating consistency with the analytical model's results. Furthermore, based on the nonlinear and biaxial coupling model, a compensator based on feedback linearization method is established, and verified through experiment. The results show that this method has a significant suppression effect on nonlinear and biaxial coupling, and the tracking error and cross-talk is obviously reduced, which proves the effectiveness of this compensation method.

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基于混合磁阻致动器的空心 XY 平台的建模与补偿

在光束指向和光电成像领域，对大行程、高带宽控制机构的需求日益增长。这些正是混合磁阻致动器的特点，因此它越来越多地被用于 XY 平台，以取代压电致动器和音圈电机。本研究提出了一种利用混合阻力致动器的空心 XY 平台，旨在适应光学应用中固有的非线性和双轴耦合，并对其进行了进一步建模和补偿，以减轻其影响。首先，介绍了空心 XY 平台的基本组成和工作原理，并阐明了其非线性和双轴耦合特性的影响。其次，分析了非线性和双轴耦合的来源，并建立了混合磁阻致动器的分析模型。确定了模型的漏磁系数，并通过有限元法（FEM）和实验验证了模型的准确性，证明了与分析模型结果的一致性。此外，基于非线性和双轴耦合模型，建立了基于反馈线性化方法的补偿器，并通过实验进行了验证。结果表明，这种方法对非线性和双轴耦合有明显的抑制作用，跟踪误差和串扰明显减小，证明了这种补偿方法的有效性。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...