Influence of N2 admixture on mode transition of discharge in N2–Ar helicon plasma

IF 2 3区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS Physics of Plasmas Pub Date : 2024-09-18 DOI:10.1063/5.0227336
Tianliang Zhang, Zhangyu Xia, Feng He, Bocong Zheng, Jiting Ouyang
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Abstract

Effects of N2 admixture on multiple wave modes and transitions were investigated in N2–Ar helicon plasma under fixed input power and magnetic field. The structures of helicon waves were measured by a B-dot probe to verify the different eigenmodes. The experimental results show that the plasma morphology, emission spectrum, and spatial profile change significantly during mode transitions with the N2–Ar ratio. The calculated results from the pressure balance model indicate that the densities of species N2, N+, Ar, and Ar+ will change largely during mode transition around some specific N2 percentages, which will help to improve the application of N2–Ar helicon plasma in material processing greatly.
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掺入 N2 对 N2-Ar 螺旋子等离子体放电模式转换的影响
在固定输入功率和磁场条件下,研究了 N2-Ar 螺旋子等离子体中 N2 掺杂对多种波模式和转换的影响。通过 B 点探针测量了螺旋波的结构,以验证不同的特征模式。实验结果表明,在模式转换过程中,等离子体的形态、发射光谱和空间轮廓会随着 N2-Ar 比率的增加而发生显著变化。压力平衡模型的计算结果表明,在某些特定的 N2 百分比附近,N2、N+、Ar 和 Ar+ 物种的密度在模式转换过程中会发生很大变化,这将有助于大大提高 N2-Ar 谐波等离子体在材料加工中的应用。
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来源期刊
Physics of Plasmas
Physics of Plasmas 物理-物理:流体与等离子体
CiteScore
4.10
自引率
22.70%
发文量
653
审稿时长
2.5 months
期刊介绍: Physics of Plasmas (PoP), published by AIP Publishing in cooperation with the APS Division of Plasma Physics, is committed to the publication of original research in all areas of experimental and theoretical plasma physics. PoP publishes comprehensive and in-depth review manuscripts covering important areas of study and Special Topics highlighting new and cutting-edge developments in plasma physics. Every year a special issue publishes the invited and review papers from the most recent meeting of the APS Division of Plasma Physics. PoP covers a broad range of important research in this dynamic field, including: -Basic plasma phenomena, waves, instabilities -Nonlinear phenomena, turbulence, transport -Magnetically confined plasmas, heating, confinement -Inertially confined plasmas, high-energy density plasma science, warm dense matter -Ionospheric, solar-system, and astrophysical plasmas -Lasers, particle beams, accelerators, radiation generation -Radiation emission, absorption, and transport -Low-temperature plasmas, plasma applications, plasma sources, sheaths -Dusty plasmas
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