{"title":"Influence of N2 admixture on mode transition of discharge in N2–Ar helicon plasma","authors":"Tianliang Zhang, Zhangyu Xia, Feng He, Bocong Zheng, Jiting Ouyang","doi":"10.1063/5.0227336","DOIUrl":null,"url":null,"abstract":"Effects of N2 admixture on multiple wave modes and transitions were investigated in N2–Ar helicon plasma under fixed input power and magnetic field. The structures of helicon waves were measured by a B-dot probe to verify the different eigenmodes. The experimental results show that the plasma morphology, emission spectrum, and spatial profile change significantly during mode transitions with the N2–Ar ratio. The calculated results from the pressure balance model indicate that the densities of species N2, N+, Ar, and Ar+ will change largely during mode transition around some specific N2 percentages, which will help to improve the application of N2–Ar helicon plasma in material processing greatly.","PeriodicalId":20175,"journal":{"name":"Physics of Plasmas","volume":"55 1","pages":""},"PeriodicalIF":2.0000,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physics of Plasmas","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1063/5.0227336","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, FLUIDS & PLASMAS","Score":null,"Total":0}
引用次数: 0
Abstract
Effects of N2 admixture on multiple wave modes and transitions were investigated in N2–Ar helicon plasma under fixed input power and magnetic field. The structures of helicon waves were measured by a B-dot probe to verify the different eigenmodes. The experimental results show that the plasma morphology, emission spectrum, and spatial profile change significantly during mode transitions with the N2–Ar ratio. The calculated results from the pressure balance model indicate that the densities of species N2, N+, Ar, and Ar+ will change largely during mode transition around some specific N2 percentages, which will help to improve the application of N2–Ar helicon plasma in material processing greatly.
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Physics of Plasmas (PoP), published by AIP Publishing in cooperation with the APS Division of Plasma Physics, is committed to the publication of original research in all areas of experimental and theoretical plasma physics. PoP publishes comprehensive and in-depth review manuscripts covering important areas of study and Special Topics highlighting new and cutting-edge developments in plasma physics. Every year a special issue publishes the invited and review papers from the most recent meeting of the APS Division of Plasma Physics. PoP covers a broad range of important research in this dynamic field, including:
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