Enhanced material removal modeling in cylindrical bonnet tool polishing: Incorporating time-dependent pad wear effects

Bingbing Teng, Chen Jiang, Zhenyu Jiang, Hui Ye, Shiwei Xu
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Abstract

To enhance the accuracy and stability of the material removal model for cylindrical bonnet tool polishing (CBTP), this study introduces a model incorporating the time-varying wear effect of the polishing pad. Initially, the functional principles of the CBTP method are systematically outlined. An advanced material removal model is then proposed, which accounts for the impact of pad wear on pressure and velocity distributions within the contact area. Experimental methods were employed to explore how pad wear affects the pad surface morphology, polishing quality, and material removal rates. Findings reveal that pad wear considerably influences both the depth of material removal and the quality of the polished surface. Validation experiments demonstrate that the enhanced model is accurate and stable. Including the time-varying factor, the discrepancy between the predicted and experimental values of the polishing spot size was 9.29 %, while the accuracy of the predicted material removal depth reached 90.74 %. Additionally, the removal profiles generated by the improved model closely matched those observed experimentally.
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圆柱形阀帽工具抛光中的强化材料去除模型:纳入随时间变化的垫片磨损效应
为了提高圆柱形阀帽工具抛光(CBTP)材料去除模型的精度和稳定性,本研究引入了一个包含抛光垫时变磨损效应的模型。首先,系统地概述了 CBTP 方法的功能原理。然后提出了一个先进的材料去除模型,该模型考虑了抛光垫磨损对接触区域内压力和速度分布的影响。实验方法用于探索垫片磨损如何影响垫片表面形态、抛光质量和材料去除率。研究结果表明,垫片磨损对材料去除深度和抛光表面质量都有很大影响。验证实验表明,增强型模型是准确和稳定的。包括时变因素在内,抛光光斑尺寸的预测值与实验值之间的差异为 9.29%,而材料去除深度的预测精度则达到了 90.74%。此外,改进模型生成的去除曲线与实验观察到的曲线非常吻合。
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来源期刊
CiteScore
7.40
自引率
5.60%
发文量
177
审稿时长
46 days
期刊介绍: Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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