Effect of process parameters on residual gas in metal package

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Vacuum Pub Date : 2024-09-26 DOI:10.1016/j.vacuum.2024.113686

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Abstract

The effect of process parameters on the residual gases, H₂O, O₂, CO₂ and H₂ in the metal package were investigated in this study. It was found that the H₂O mainly came from the surface adsorption of raw materials and the H₂ was from the electroplated Ni/Au layers of Kovar alloy. The O₂ primarily came from the water vapor and the environment, while the CO₂ in the cavity was mainly generated by the reaction between the O₂ and residual carbon. The temperature and holding time of the baking, parallel seam welding and screening aging process could effectively affect the content of H₂O, O₂, H₂ and CO₂ in the cavity. Prior to sealing, increasing the temperature of baking and parallel seam welding could reduce the contents of H₂O, O₂ and H₂. However, after sealing, the H₂O and H₂ absorbed on the material surfaces continued to desorb into the sealed cavity during the screening aging process, leading to the increase of the H₂O and H₂ content. It was also found that the gas leakage has an important effect on the residual gas inside the cavity. In the long-term screening aging process, the O₂ could leak into the cavity from the air because of the concentration gradient. In the meantime, the O₂ reacted with the residual carbon to generate CO₂, causing an increase in the CO₂ content. As the CO₂ concentration in the cavity was higher than that in the air, it would leak into the air until equilibrium was reached.

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工艺参数对金属包装中残余气体的影响

本研究调查了工艺参数对金属包中残留气体 H2O、O2、CO2 和 H2 的影响。研究发现，H2O 主要来自原材料的表面吸附，而 H2 则来自 Kovar 合金的电镀 Ni/Au 层。O2 主要来自水蒸气和环境，而空腔中的 CO2 主要由 O2 和残碳反应生成。烘烤、平行缝焊接和筛选老化过程的温度和保温时间可有效影响型腔中 H2O、O2、H2 和 CO2 的含量。密封前，提高烘烤和平行缝焊接的温度可降低 H2O、O2 和 H2 的含量。然而，密封后，材料表面吸收的 H2O 和 H2 在筛选老化过程中继续解吸到密封腔中，导致 H2O 和 H2 含量增加。研究还发现，气体泄漏对空腔内的残余气体有重要影响。在长期筛选老化过程中，由于浓度梯度的存在，O2 可能会从空气中泄漏到空腔中。同时，O2 与残碳反应生成 CO2，导致 CO2 含量增加。由于空腔中的二氧化碳浓度高于空气中的浓度，二氧化碳会渗入空气中，直至达到平衡。

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来源期刊

Vacuum 工程技术-材料科学：综合

CiteScore

6.80

自引率

17.50%

发文量

审稿时长

34 days

期刊介绍： Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.