Bridging piezoelectric and electrostatic effects: a novel piezo-MEMS pitch/roll gyroscope with sub 10°/h bias instability.

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-10-30 DOI:10.1038/s41378-024-00773-7
Zhenxiang Qi, Bowen Wang, Zhaoyang Zhai, Zheng Wang, Xingyin Xiong, Wuhao Yang, Xiaorui Bie, Yao Wang, Xudong Zou
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Abstract

This paper proposes a novel piezo-MEMS pitch/roll gyroscope that co-integrates piezoelectric and electrostatic effects, for the first time achieves electrostatic mode-matching operation for piezoelectric gyroscopes. Movement of operated out-of-plane (OOP) mode (n = 3) and in-plane (IP) mode (n = 2) are orthogonal, ensuring that the OOP amplitude is not significantly limited by parallel plates set at nodes of IP mode. Therefore, a large OOP driving amplitude actuated by piezoelectric and frequency tuning in the IP sense mode trimmed by electrostatic can be achieved together with a low risk of pull-in, hence releases the trade-off between the tuning range and the linear actuation range. At a tuning voltage of 66 V, the frequency split decreased from 171 Hz to 0.1 Hz, resulting in a 167x times improvement in sensitivity. The mode-matched gyroscope exhibits an angle random walk (ARW) of 0.41°/√h and a bias instability (BI) of 8.85°/h on a test board within a customized vacuum chamber, marking enhancements of 68x and 301x, respectively, compared to its performance under mode-mismatch conditions. The BI performance of the presented pitch/roll gyroscope is comparable to that of the highest-performing mechanically trimmed piezo-MEMS yaw gyroscopes known to date, while offering the unique advantage of lower cost, better mode-matching resolution, and the flexibility of real-time frequency control.

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压电效应和静电效应的桥梁:具有低于 10°/h 偏置不稳定性的新型压电-MEMS俯仰/滚动陀螺仪。
本文提出了一种新型压电-MEMS俯仰/滚动陀螺仪,它将压电效应和静电效应结合在一起,首次实现了压电陀螺仪的静电模式匹配操作。平面外(OOP)模式(n = 3)和平面内(IP)模式(n = 2)的运动是正交的,这确保了 OOP 振幅不会受到设置在 IP 模式节点上的平行板的明显限制。因此,通过压电驱动的大 OOP 驱动振幅和通过静电微调的 IP 感测模式中的频率调谐可以同时实现,而且拉入风险较低,因此可以在调谐范围和线性驱动范围之间进行权衡。在 66 V 的调谐电压下,分频从 171 Hz 降至 0.1 Hz,灵敏度提高了 167 倍。模式匹配陀螺仪在定制真空室中的测试板上显示出 0.41°/√h 的角度随机漫步 (ARW) 和 8.85°/h 的偏置不稳定性 (BI),与模式不匹配条件下的性能相比,分别提高了 68 倍和 301 倍。所展示的俯仰/滚动陀螺仪的偏置不稳定性能可与迄今已知性能最高的机械微调压电-MEMS 偏航陀螺仪相媲美,同时还具有成本更低、模式匹配分辨率更高以及实时频率控制灵活性更强的独特优势。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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