3D Nanolithography via Holographic Multi-Focus Metalens (Laser Photonics Rev. 18(11)/2024)

IF 9.8 1区 物理与天体物理 Q1 OPTICS Laser & Photonics Reviews Pub Date : 2024-11-11 DOI:10.1002/lpor.202470065
Xinger Wang, Xuhao Fan, Yuncheng Liu, Ke Xu, Yining Zhou, Zexu Zhang, Fayu Chen, Xuan Yu, Leimin Deng, Hui Gao, Wei Xiong
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Abstract

3D Nanolithography via Holographic Multi-Focus Metalens

In article number 2400181, Xinger Wang, Hui Gao, Wei Xiong, and co-workers propose a metasurface-based two-photon polymerization technique. A metasurface is introduced into 3D nanolithography for the first time, resulting in the construction of a miniaturized and simplified two-photon lithography system that achieves efficient multi-focus parallel processing with high uniformity. It is believed that the utilization of the metasurface will provide a novel two-photon lithography operating platform, enabling richer and more flexible printing functionalities while maintaining system miniaturization and low cost.

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通过全息多焦点 Metalens 实现三维纳米光刻(激光光子学报 18(11)/2024)
通过全息多焦点金属化实现三维纳米光刻在文章编号 2400181 中,Xinger Wang、Hui Gao、Wei Xiong 及其合作者提出了一种基于元表面的双光子聚合技术。他们首次在三维纳米光刻技术中引入了元表面,从而构建了一个小型化和简化的双光子光刻系统,实现了高效的多焦点并行处理和高均匀性。相信元表面的应用将提供一个新颖的双光子光刻操作平台,在保持系统微型化和低成本的同时,实现更丰富、更灵活的打印功能。
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来源期刊
CiteScore
14.20
自引率
5.50%
发文量
314
审稿时长
2 months
期刊介绍: Laser & Photonics Reviews is a reputable journal that publishes high-quality Reviews, original Research Articles, and Perspectives in the field of photonics and optics. It covers both theoretical and experimental aspects, including recent groundbreaking research, specific advancements, and innovative applications. As evidence of its impact and recognition, Laser & Photonics Reviews boasts a remarkable 2022 Impact Factor of 11.0, according to the Journal Citation Reports from Clarivate Analytics (2023). Moreover, it holds impressive rankings in the InCites Journal Citation Reports: in 2021, it was ranked 6th out of 101 in the field of Optics, 15th out of 161 in Applied Physics, and 12th out of 69 in Condensed Matter Physics. The journal uses the ISSN numbers 1863-8880 for print and 1863-8899 for online publications.
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