Enhancement of the quality of mc-Si ingot grown by vacuum directional solidification furnace with growth rate increase reducing the cost of the wafer for PV application: Carbon and oxygen analysis
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引用次数: 0
Abstract
In this paper, we propose a numerical model to investigate the dissolution of oxygen atoms from the porous silica crucible, SiO gas formation, back diffusion of CO gas and segregation of carbon and oxygen during the growth of multi-crystalline silicon (mc-Si) by vacuum directional solidification (VDS) at different growth rates (3, 6 and 9 mm/h) by silt valve opening rate. The dissolution of oxygen decreases during the rapid growth of ingot because the reaction between the molten silicon and the porous silica crucible is constrained. This limitation on oxygen dissolution from the porous silica crucible further diminishes chemical reaction inside the VDS furnace. Consequently, the segregation pattern of the carbon and oxygen is affected at higher growth rate. During the VDS mc-Si growth, a growth rate of 9mm/h yields better quality of the VDS grown mc-Si ingots compared to other growth rates, this rate reduces SiC precipitation and SiO2 cluster formation due to lower concentration of carbon and oxygen. The obtained carbon concentration minimizes the wire saw defects. Based on these numerical results (9 mm/h), we have implemented experimental work. Prepared samples are analyzed using FTIR spectra and minority carrier lifetime measurements. The effect of oxygen concentration in the samples is analyzed in the minority carrier lifetime measurements. The oxygen and carbon concentrations are calculated by FTIR spectra and their results are compared with the numerical simulation.
期刊介绍：
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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