Topological Insulator Nanowires Made by AFM Nanopatterning: Fabrication Process and Ultra Low-Temperature Transport Properties (Adv. Phys. Res. 12/2024)

Dmitry S. Yakovlev, Aleksei V. Frolov, Ivan A. Nazhestkin, Alexei G. Temiryazev, Andrey P. Orlov, Jonathan Shvartzberg, Sergey E. Dizhur, Vladimir L. Gurtovoi, Razmik Hovhannisyan, Vasily S. Stolyarov
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Abstract

Atomic Force Lithography

The study 2400108 by Dmitry Yakovlev and co-workers introduces a novel approach to using atomic force microscopy (AFM) pulse force nanolithography to fabricate Bi2Se3 nanoribbons with high precision. This allows control over their dimensions and prevents contamination from standard electron beam lithography or reactive ion etching. The illustration shows a pie of complex multilayer heterostructures cut into small pieces by using atomic force lithography with an accuracy of a few nanometers. The results also reveal insights into electronic structure, conductance, and phase coherence in TIs, with thermal excitation and bias current affecting coherence length. This new AFM technique offers a scalable and precise approach.

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原子力显微镜制备拓扑绝缘体纳米线:制备工艺及超低温输运特性(物理学报)。研究》12/2024)
Dmitry Yakovlev及其同事的研究2400108介绍了一种利用原子力显微镜(AFM)脉冲力纳米光刻技术高精度制备Bi2Se3纳米带的新方法。这样可以控制它们的尺寸,并防止来自标准电子束光刻或反应性离子蚀刻的污染。该图显示了一个复杂的多层异质结构饼,用原子力光刻技术切割成小块,精度为几纳米。结果还揭示了ti中的电子结构,电导和相相干性,热激发和偏置电流影响相干长度。这种新的AFM技术提供了一种可扩展和精确的方法。
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