Nonlinear coupling of closely spaced modes in atomically thin MoS2 nanoelectromechanical resonators.

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-12-27 DOI:10.1038/s41378-024-00844-9
S M Enamul Hoque Yousuf, Steven W Shaw, Philip X-L Feng
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Abstract

Nanoelectromechanical systems (NEMS) incorporating atomic or molecular layer van der Waals materials can support multimode resonances and exotic nonlinear dynamics. Here we investigate nonlinear coupling of closely spaced modes in a bilayer (2L) molybdenum disulfide (MoS2) nanoelectromechanical resonator. We model the response from a drumhead resonator using equations of two resonant modes with a dispersive coupling term to describe the vibration induced frequency shifts that result from the induced change in tension. We employ method of averaging to solve the equations of coupled modes and extract an expression for the nonlinear coupling coefficient (λ) in closed form. Undriven thermomechanical noise spectral measurements are used to calibrate the vibration amplitude of mode 2 (a2) in the displacement domain. We drive mode 2 near its natural frequency and measure the shifted resonance frequency of mode 1 (f1s) resulting from the dispersive coupling. Our model yields λ = 0.027 ± 0.005 pm-2 · μs-2 from thermomechanical noise measurement of mode 1. Our model also captures an anomalous frequency shift of the undriven mode 1 due to nonlinear coupling to the driven mode 2 mediated by large dynamic tension. This study provides a direct means to quantifying λ by measuring the thermomechanical noise in NEMS and will be valuable for understanding nonlinear mode coupling in emerging resonant systems.

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原子薄二硫化钼纳米机电谐振器中紧密间隔模式的非线性耦合。
采用原子或分子层范德华材料的纳米机电系统(NEMS)可以支持多模共振和外来非线性动力学。本文研究了双层(2L)二硫化钼(MoS2)纳米机电谐振器中紧密间隔模式的非线性耦合。我们用两种共振模式的方程来描述由张力变化引起的振动引起的频移,用色散耦合项来描述鼓形谐振器的响应。采用平均法求解耦合模态方程,得到非线性耦合系数λ的封闭表达式。非驱动热机械噪声谱测量用于校准模态2 (a2)在位移域中的振动幅值。我们在模2固有频率附近驱动模2,并测量了由于色散耦合引起的模1 (f1s)的移位谐振频率。我们的模型从模式1的热机械噪声测量得到λ = 0.027±0.005 pm-2·μs-2。我们的模型还捕获了由于由大动态张力介导的非线性耦合到驱动模态2的非驱动模态1的异常频移。本研究提供了一种通过测量NEMS中的热机械噪声来量化λ的直接方法,并将对理解新兴谐振系统中的非线性模式耦合有价值。
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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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