Progresses and Frontiers in Ultrawide Bandgap Semiconductors

IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Advanced Electronic Materials Pub Date : 2025-01-07 DOI:10.1002/aelm.202400934
Siddharth Rajan, Xiaohang Li
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The diversity of approaches represented here is also striking. Researchers have explored multiple material systems—including AlGaN, Ga2O3, and novel oxide semiconductors—each offering unique capabilities that extend the boundaries of traditional semiconductor technologies. The breadth of investigations ranges from fundamental material characterization to device engineering, reflecting the interdisciplinary nature of modern materials research.</p><p>In “Thermal Stability of Schottky Contacts and Rearrangement of Defects in β-Ga2O3 Crystals” (aelm.202300428), P. Seyidov and co-authors investigate the thermal stability of Schottky contacts (Au, Pt, Ni) on β-Ga2O3 single crystals. The study reveals critical insights into defect levels and material behavior under thermal stress, identifying defect levels and discussing the rearrangement and dissociation of hydrogen in Ga-O divacancy complexes. These findings are essential for understanding the reliability and performance of β-Ga2O3-based devices under high-temperature conditions.</p><p>In “Discovery of a Robust p-type Ultrawide Bandgap Oxide Semiconductor: LiGa5O8” (aelm.202300550), H. Zhao and co-authors introduce a novel p-type UWBG oxide semiconductor with a bandgap of ≈5.36 eV. Utilizing mist-chemical vapor deposition (M-CVD), the study demonstrates robust p-type conductivity with a wide range of hole concentrations. This discovery opens new avenues for creating efficient and robust electronic and optoelectronic devices.</p><p>In “Wide-Bandgap Nickel Oxide with Tunable Acceptor Concentration for Multidimensional Power Devices” (aelm.202300662), Y. Zhang and co-authors explore the modulation of acceptor concentration (NA) in NiO by controlling the oxygen partial pressure during magnetron sputtering. The study reveals a tunable acceptor concentration, with practical breakdown fields (EB) ranging from 3.8 to 6.3 MV cm⁻<sup>1</sup>. These findings highlight the potential of NiO as a p-type material for power devices, enabling performance beyond conventional limits.</p><p>In “Material Properties of n-type β-Ga2O3 Epilayers with In-Situ Doping Grown on Sapphire by Metalorganic Chemical Vapor Deposition” (aelm.202300679), R. Horng and co-authors provide valuable insights into the electrical properties and doping efficiency of these materials. The research underscores the importance of optimizing growth conditions to enhance dopant activation and carrier mobility.</p><p>In “Semiconductor Membrane Exfoliation: Technology and Application” (aelm.202300832), B. Ooi and co-authors give a review of various techniques for the exfoliation and transfer of semiconductor membranes, including chemical exfoliation, laser lift-off, mesoporous-layer-assisted exfoliation, and 2D material-assisted exfoliation. These methods present new possibilities for flexible optoelectronic devices and offer innovative pathways for integrating high-performance materials into diverse applications.</p><p>In “Progress in Performance of AlGaN-based Ultraviolet Light Emitting Diodes”(aelm.202300840), F. Xu and co-authors review challenges and progress in electrical injection, electro-optical conversion, and light extraction in AlGaN-based UV-LEDs. The papers highlights strategies to enhance carrier injection efficiency and reduce contact resistivity, paving the way for more efficient and reliable UV-LEDs for applications ranging from sterilization to high-density data storage.</p><p>In “Recent Advanced Ultra-Wide Bandgap β-Ga2O3 Material and Device Technologies” (aelm.202300844), H. Zhou and co-authors provide a comprehensive review of β-Ga2O3 thin films and devices, covering various growth techniques, including MBE, MOCVD, HVPE, PLD, and Mist-CVD. The article emphasizes the importance of interface quality and power device fabrication, providing a roadmap for future research and development in this promising material system.</p><p>In “Lossless Phonon Transition through Interfaces with Diamond” (aelm.202400146), S. Chowdhury and co-authors study the integration of diamond as a heat spreader in 3D ICs and GaN power amplifiers, highlighting the potential of diamond to significantly reduce thermal boundary resistance (TBR) with interlayers such as SiO2, a-SiC, and SiNx. This research is crucial for developing high-power devices with improved thermal management and reliability.</p><p>In “Al-rich AlGaN Channel High Electron Mobility Transistors on Silicon: A Relevant Approach for High Temperature Stability of Electron Mobility” (aelm.202400069), J. Bassaler and co-authors investigate AlGaN channel heterostructures on silicon, examining electron mobility and temperature stability. The study explores the impact of Al composition in various layers on device performance, providing insights into optimizing heterostructures for high-temperature applications.</p><p>In “Rhodium-Alloyed Beta Gallium Oxide Materials: New Type Ternary Ultra-Wide Bandgap Semiconductors” (aelm.202400547), D. Zhang and co-authors introduce a new class of ternary UWBG semiconductors with enhanced valence band maximum and reduced hole mass. These materials show promise for high-power electronic devices, offering improved performance and efficiency.</p><p>In “Out-diffusion and Uphill-diffusion of Mg in Czochralski-grown (100) β-Ga2O3 under High-temperature Annealing and Its Influence on Lateral MOSFET Devices” (aelm.202400342), A. Popp and co-authors study Mg-doped β-Ga2O3 films, investigating the effects of annealing on Mg diffusion and its impact on device performance. The research demonstrates that controlled Mg doping and annealing processes can significantly enhance the performance of power devices.</p><p>In “Unraveling Abnormal Thermal Quenching of Sub-gap Emission in β-Ga2O3” (aelm.202400315), J. Ye and co-authors explore the electronic properties of β-Ga2O3, including relaxation and spin polarization, providing a deeper understanding of bandgap calculation and carrier mass analysis. These insights are essential for designing devices with optimized electronic properties.</p><p>In “Machine Learning Enabled High-Throughput Screening of 2D Ultrawide Bandgap Semiconductors for Flexible Resistive Materials” (aelm.202400435), C. Chen and co-authors use machine-learning assisted first-principles modeling to predict the electronic properties of a large number of 2D ultra-wide bandgap semiconductors. Studies like this could be the seed for future research in the coming decades.</p><p>In “In Situ Growth of (−201) Fiber-Textured β-Ga2O<sub>3</sub> Semiconductor Tape for Flexible Thin-Film Transistor” (aelm.202400046), Xiao Tang and co-authors achieve high-temperature in situ growth of Ga2O3 thin films on SiO<sub>x</sub>/Al2O<sub>x</sub> buffered substrates. This method overcomes the thermal-stability limitations of conventional polymer substrates, resulting in Ga<sub>2</sub>O<sub>3</sub> thin films with a preferred (−201) orientation. The transistors exhibit good electrical performance, uniformity, and mechanical robustness, making this technique promising for flexible Ga2O3-based electronic circuits and potentially other high-temperature processed flexible semiconductor devices.</p><p>In “Design and Optimization for AlGaN-Based Deep Ultraviolet Fabry–Perot Laser Diodes” (aelm.202400247), Jianyu Yang and co-authors use Technology Computer Aided Design (TCAD) simulations to develop physical models for AlGaN-based deep ultraviolet Fabry–Perot laser diodes (DUV LDs). They find that increasing the Al composition in the p-waveguide and p-type cladding layer shifts the optical field to the n-region, reducing free-carrier absorption in the p-region. However, this must be balanced to avoid decreasing the optical confinement factor and increasing electron leakage. The study suggests that optimizing the Al composition in the p-electron blocking layer can improve both optical and electrical properties of DUV LD.</p><p>In “Electronic Properties of Ultra-Wide Bandgap BxAl1−xN Computed from First-Principles Simulations” (aelm.202400549), Cody L. Milne and co-authors predict the electronic properties of ground states of BAlN using first-principles density functional theory and many-body perturbation theory within the GW approximation. They find that BAlN structures are ultra-wide bandgap materials with bandgaps varying linearly from 6.19 eV (wurtzite-phase AlN) to 7.47 eV (w-BN). The study also reveals a direct-to-indirect bandgap crossover near x = 0.25 and larger dielectric constants for BAlN alloys compared to their bulk counterparts, with values up to 12.1 ɛ0. These findings advance the understanding of BAlN properties, aiding their application in next-generation power electronics.</p><p>In “Enhanced UV-Visible Rejection Ratio in Metal/BaTiO<sub>3</sub>/β-Ga<sub>2</sub>O<sub>3</sub> Solar-Blind Photodetectors” (aelm.202400552), N. Wriedt and co-authors investigated the characteristics of Gallium Oxide-based photodetectors. They find that the photodetector gain in these structures can be explained by a positive trapped hole charge that causes enhancement of electron injection due to image force lowering. They also find remarkable improvement in the UV-visible rejection ratio by insertion of a thin high-permittivity BaTiO<sub>3</sub> layer between the metal and the semiconductor. 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引用次数: 0

Abstract

The field of ultra-wide bandgap (UWBG) semiconductors is experiencing a transformative era, driven by the relentless pursuit of materials and technologies that promise to revolutionize power electronics, optoelectronics, and beyond. This special issue brings together a collection of pioneering review and research articles that highlight the latest advancements and future directions in UWB semiconductor technology.

The articles compiled in this issue underscore the remarkable potential of UWBG semiconductors to address critical challenges in materials science and device engineering. From deep ultraviolet optoelectronics to high-temperature electronic applications, the research demonstrates the versatility and unprecedented performance characteristics of these advanced materials. The diversity of approaches represented here is also striking. Researchers have explored multiple material systems—including AlGaN, Ga2O3, and novel oxide semiconductors—each offering unique capabilities that extend the boundaries of traditional semiconductor technologies. The breadth of investigations ranges from fundamental material characterization to device engineering, reflecting the interdisciplinary nature of modern materials research.

In “Thermal Stability of Schottky Contacts and Rearrangement of Defects in β-Ga2O3 Crystals” (aelm.202300428), P. Seyidov and co-authors investigate the thermal stability of Schottky contacts (Au, Pt, Ni) on β-Ga2O3 single crystals. The study reveals critical insights into defect levels and material behavior under thermal stress, identifying defect levels and discussing the rearrangement and dissociation of hydrogen in Ga-O divacancy complexes. These findings are essential for understanding the reliability and performance of β-Ga2O3-based devices under high-temperature conditions.

In “Discovery of a Robust p-type Ultrawide Bandgap Oxide Semiconductor: LiGa5O8” (aelm.202300550), H. Zhao and co-authors introduce a novel p-type UWBG oxide semiconductor with a bandgap of ≈5.36 eV. Utilizing mist-chemical vapor deposition (M-CVD), the study demonstrates robust p-type conductivity with a wide range of hole concentrations. This discovery opens new avenues for creating efficient and robust electronic and optoelectronic devices.

In “Wide-Bandgap Nickel Oxide with Tunable Acceptor Concentration for Multidimensional Power Devices” (aelm.202300662), Y. Zhang and co-authors explore the modulation of acceptor concentration (NA) in NiO by controlling the oxygen partial pressure during magnetron sputtering. The study reveals a tunable acceptor concentration, with practical breakdown fields (EB) ranging from 3.8 to 6.3 MV cm⁻1. These findings highlight the potential of NiO as a p-type material for power devices, enabling performance beyond conventional limits.

In “Material Properties of n-type β-Ga2O3 Epilayers with In-Situ Doping Grown on Sapphire by Metalorganic Chemical Vapor Deposition” (aelm.202300679), R. Horng and co-authors provide valuable insights into the electrical properties and doping efficiency of these materials. The research underscores the importance of optimizing growth conditions to enhance dopant activation and carrier mobility.

In “Semiconductor Membrane Exfoliation: Technology and Application” (aelm.202300832), B. Ooi and co-authors give a review of various techniques for the exfoliation and transfer of semiconductor membranes, including chemical exfoliation, laser lift-off, mesoporous-layer-assisted exfoliation, and 2D material-assisted exfoliation. These methods present new possibilities for flexible optoelectronic devices and offer innovative pathways for integrating high-performance materials into diverse applications.

In “Progress in Performance of AlGaN-based Ultraviolet Light Emitting Diodes”(aelm.202300840), F. Xu and co-authors review challenges and progress in electrical injection, electro-optical conversion, and light extraction in AlGaN-based UV-LEDs. The papers highlights strategies to enhance carrier injection efficiency and reduce contact resistivity, paving the way for more efficient and reliable UV-LEDs for applications ranging from sterilization to high-density data storage.

In “Recent Advanced Ultra-Wide Bandgap β-Ga2O3 Material and Device Technologies” (aelm.202300844), H. Zhou and co-authors provide a comprehensive review of β-Ga2O3 thin films and devices, covering various growth techniques, including MBE, MOCVD, HVPE, PLD, and Mist-CVD. The article emphasizes the importance of interface quality and power device fabrication, providing a roadmap for future research and development in this promising material system.

In “Lossless Phonon Transition through Interfaces with Diamond” (aelm.202400146), S. Chowdhury and co-authors study the integration of diamond as a heat spreader in 3D ICs and GaN power amplifiers, highlighting the potential of diamond to significantly reduce thermal boundary resistance (TBR) with interlayers such as SiO2, a-SiC, and SiNx. This research is crucial for developing high-power devices with improved thermal management and reliability.

In “Al-rich AlGaN Channel High Electron Mobility Transistors on Silicon: A Relevant Approach for High Temperature Stability of Electron Mobility” (aelm.202400069), J. Bassaler and co-authors investigate AlGaN channel heterostructures on silicon, examining electron mobility and temperature stability. The study explores the impact of Al composition in various layers on device performance, providing insights into optimizing heterostructures for high-temperature applications.

In “Rhodium-Alloyed Beta Gallium Oxide Materials: New Type Ternary Ultra-Wide Bandgap Semiconductors” (aelm.202400547), D. Zhang and co-authors introduce a new class of ternary UWBG semiconductors with enhanced valence band maximum and reduced hole mass. These materials show promise for high-power electronic devices, offering improved performance and efficiency.

In “Out-diffusion and Uphill-diffusion of Mg in Czochralski-grown (100) β-Ga2O3 under High-temperature Annealing and Its Influence on Lateral MOSFET Devices” (aelm.202400342), A. Popp and co-authors study Mg-doped β-Ga2O3 films, investigating the effects of annealing on Mg diffusion and its impact on device performance. The research demonstrates that controlled Mg doping and annealing processes can significantly enhance the performance of power devices.

In “Unraveling Abnormal Thermal Quenching of Sub-gap Emission in β-Ga2O3” (aelm.202400315), J. Ye and co-authors explore the electronic properties of β-Ga2O3, including relaxation and spin polarization, providing a deeper understanding of bandgap calculation and carrier mass analysis. These insights are essential for designing devices with optimized electronic properties.

In “Machine Learning Enabled High-Throughput Screening of 2D Ultrawide Bandgap Semiconductors for Flexible Resistive Materials” (aelm.202400435), C. Chen and co-authors use machine-learning assisted first-principles modeling to predict the electronic properties of a large number of 2D ultra-wide bandgap semiconductors. Studies like this could be the seed for future research in the coming decades.

In “In Situ Growth of (−201) Fiber-Textured β-Ga2O3 Semiconductor Tape for Flexible Thin-Film Transistor” (aelm.202400046), Xiao Tang and co-authors achieve high-temperature in situ growth of Ga2O3 thin films on SiOx/Al2Ox buffered substrates. This method overcomes the thermal-stability limitations of conventional polymer substrates, resulting in Ga2O3 thin films with a preferred (−201) orientation. The transistors exhibit good electrical performance, uniformity, and mechanical robustness, making this technique promising for flexible Ga2O3-based electronic circuits and potentially other high-temperature processed flexible semiconductor devices.

In “Design and Optimization for AlGaN-Based Deep Ultraviolet Fabry–Perot Laser Diodes” (aelm.202400247), Jianyu Yang and co-authors use Technology Computer Aided Design (TCAD) simulations to develop physical models for AlGaN-based deep ultraviolet Fabry–Perot laser diodes (DUV LDs). They find that increasing the Al composition in the p-waveguide and p-type cladding layer shifts the optical field to the n-region, reducing free-carrier absorption in the p-region. However, this must be balanced to avoid decreasing the optical confinement factor and increasing electron leakage. The study suggests that optimizing the Al composition in the p-electron blocking layer can improve both optical and electrical properties of DUV LD.

In “Electronic Properties of Ultra-Wide Bandgap BxAl1−xN Computed from First-Principles Simulations” (aelm.202400549), Cody L. Milne and co-authors predict the electronic properties of ground states of BAlN using first-principles density functional theory and many-body perturbation theory within the GW approximation. They find that BAlN structures are ultra-wide bandgap materials with bandgaps varying linearly from 6.19 eV (wurtzite-phase AlN) to 7.47 eV (w-BN). The study also reveals a direct-to-indirect bandgap crossover near x = 0.25 and larger dielectric constants for BAlN alloys compared to their bulk counterparts, with values up to 12.1 ɛ0. These findings advance the understanding of BAlN properties, aiding their application in next-generation power electronics.

In “Enhanced UV-Visible Rejection Ratio in Metal/BaTiO3/β-Ga2O3 Solar-Blind Photodetectors” (aelm.202400552), N. Wriedt and co-authors investigated the characteristics of Gallium Oxide-based photodetectors. They find that the photodetector gain in these structures can be explained by a positive trapped hole charge that causes enhancement of electron injection due to image force lowering. They also find remarkable improvement in the UV-visible rejection ratio by insertion of a thin high-permittivity BaTiO3 layer between the metal and the semiconductor. The findings advance the understanding of Gallium Oxide photodetectors, and could enable higher performance photodetectors in the future.

While the research presented here is groundbreaking, it also highlights the ongoing challenges and opportunities in UWBG emiconductors. Issues of material quality, interface engineering, doping control, and thermal management remain critical areas for continued investigation. The ability to manipulate material properties at increasingly sophisticated levels—whether through precise doping techniques, interface engineering, or novel growth methodologies—represents a key frontier in this field. The potential applications are vast, spanning high-power electronics, extreme environment sensors, ultraviolet optoelectronics, and beyond.

The research compiled in this special issue offers a glimpse into the transformative potential of UWBG semiconductors. The interdisciplinary nature of these investigations—bridging materials science, physics, and engineering—underscores the collaborative spirit driving technological innovation. The articles within this issue not only represent individual scientific achievements, but collectively point toward a future where semiconductor technologies can operate in increasingly extreme and unconventional environments. From deep ultraviolet lasers to flexible electronics, from high-temperature stable transistors to novel oxide semiconductors, the horizon of possibilities continues to expand.

We thank the Advanced Electronic Materials Editor-in-Chief Gaia Tomasello for inviting us to co-edit this special issue, and for her continuous support at each stage of the preparation of this issue. We would like to thank all the authors for their contributions.

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超宽带隙半导体的研究进展与前沿
由于对材料和技术的不懈追求,超宽带隙(UWBG)半导体领域正在经历一个变革时代,这些材料和技术有望彻底改变电力电子、光电子等领域。本期特刊汇集了一系列开创性的评论和研究文章,突出了超宽带半导体技术的最新进展和未来方向。本期收录的文章强调了UWBG半导体在解决材料科学和器件工程中的关键挑战方面的巨大潜力。从深紫外光电子到高温电子应用,该研究展示了这些先进材料的多功能性和前所未有的性能特征。这里所代表的方法的多样性也是惊人的。研究人员已经探索了多种材料系统,包括AlGaN, Ga2O3和新型氧化物半导体,每种材料都提供了扩展传统半导体技术边界的独特功能。研究范围从基础材料表征到器件工程,反映了现代材料研究的跨学科性质。在“β-Ga2O3晶体中肖特基触点的热稳定性和缺陷重排”(aelm.202300428)中,P. Seyidov和合著者研究了β-Ga2O3单晶上肖特基触点(Au, Pt, Ni)的热稳定性。该研究揭示了热应力下缺陷水平和材料行为的关键见解,确定了缺陷水平,并讨论了Ga-O空位配合物中氢的重排和解离。这些发现对于理解高温条件下β- ga2o3基器件的可靠性和性能至关重要。在“发现一种鲁棒的p型超宽带隙氧化物半导体:LiGa5O8”(aelm.202300550)中,H. Zhao等介绍了一种带隙≈5.36 eV的新型p型UWBG氧化物半导体。利用雾化学气相沉积(M-CVD),该研究证明了在大范围的空穴浓度下具有强大的p型电导率。这一发现为创造高效、稳健的电子和光电子器件开辟了新的途径。张勇等在“基于可调受体浓度的宽禁带氧化镍用于多层功率器件”(aelm.202300662)中,通过控制磁控溅射过程中的氧分压,研究了NiO中受体浓度(NA)的调制。研究表明,受体浓度可调,实际击穿场(EB)范围为3.8 - 6.3 MV cm毒血症。这些发现突出了NiO作为动力器件p型材料的潜力,使其性能超越传统限制。在“金属有机化学气相沉积法在蓝宝石上原位掺杂n型β-Ga2O3薄膜的材料性质”(aelm.202300679)中,R. hong及其合作者对这些材料的电学性质和掺杂效率提供了有价值的见解。该研究强调了优化生长条件以提高掺杂剂活化和载流子迁移率的重要性。在“半导体膜剥离:技术与应用”(aelm.202300832)中,B. Ooi及其合著者综述了半导体膜剥离和转移的各种技术,包括化学剥离、激光剥离、介孔层辅助剥离和二维材料辅助剥离。这些方法为柔性光电器件提供了新的可能性,并为将高性能材料集成到各种应用中提供了创新途径。在“algan基紫外发光二极管性能的进展”(aelm.202300840)中,徐峰等人回顾了algan基紫外发光二极管在电注入、电光转换和光提取方面的挑战和进展。论文重点介绍了提高载流子注入效率和降低接触电阻率的策略,为从灭菌到高密度数据存储的更高效、更可靠的uv - led应用铺平了道路。在“最近先进的超宽带隙β-Ga2O3材料和器件技术”(aelm.202300844)中,H. Zhou及其合作者对β-Ga2O3薄膜和器件进行了全面的综述,涵盖了各种生长技术,包括MBE, MOCVD, HVPE, PLD和雾- cvd。文章强调了接口质量和功率器件制造的重要性,为这一有前途的材料体系的未来研究和发展提供了路线图。在“通过金刚石界面的无损声子跃迁”(aelm.202400146)中,S. Chowdhury及其合著者研究了金刚石在3D集成电路和GaN功率放大器中作为散热片的集成,强调了金刚石在与SiO2, a- sic和SiNx等中间层之间显着降低热边界电阻(TBR)的潜力。 这些发现促进了对氧化镓光电探测器的理解,并可能在未来实现更高性能的光电探测器。虽然这里展示的研究是开创性的,但它也突出了UWBG半导体的持续挑战和机遇。材料质量、界面工程、掺杂控制和热管理问题仍然是继续研究的关键领域。无论是通过精确的掺杂技术、界面工程还是新颖的生长方法,在日益复杂的水平上操纵材料特性的能力都代表了该领域的关键前沿。潜在的应用是巨大的,跨越高功率电子,极端环境传感器,紫外光电子等。本期特刊中收录的研究成果让我们得以一窥UWBG半导体的变革潜力。这些研究的跨学科性质——连接材料科学、物理学和工程学——强调了推动技术创新的合作精神。这期中的文章不仅代表了个人的科学成就,而且共同指出了半导体技术可以在越来越极端和非常规的环境中运行的未来。从深紫外激光器到柔性电子器件,从高温稳定晶体管到新型氧化物半导体,可能性的地平线不断扩大。我们感谢应用电子材料总编辑Gaia Tomasello邀请我们共同编辑本期特刊,并感谢她在本期准备的每个阶段持续不断的支持。我们要感谢所有作者的贡献。
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Advanced Electronic Materials
Advanced Electronic Materials NANOSCIENCE & NANOTECHNOLOGYMATERIALS SCIE-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
11.00
自引率
3.20%
发文量
433
期刊介绍: Advanced Electronic Materials is an interdisciplinary forum for peer-reviewed, high-quality, high-impact research in the fields of materials science, physics, and engineering of electronic and magnetic materials. It includes research on physics and physical properties of electronic and magnetic materials, spintronics, electronics, device physics and engineering, micro- and nano-electromechanical systems, and organic electronics, in addition to fundamental research.
期刊最新文献
High-Throughput Production of Electrically Conductive Yarn (E-Yarn) for Smart Textiles Edge of Chaos Theory Unveils the First and Simplest Ever Reported Hodgkin–Huxley Neuristor Ge N-Channel Ferroelectric FET Memory With Al2O3/AlN Interfacial Layer by Microwave Annealing Encapsulated Organohydrogel Couplants for Wearable Ultrasounds Improved Magnetoresistance of Tungsten Telluride and Silver Telluride Composites
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