3D active-matrix multimodal sensor arrays for independent detection of pressure and temperature

Abstract

Pressure and temperature sensing simultaneously and independently is crucial for creating electronic skin that replicates complex sensory functions of human skin. Thin-film transistor (TFT) arrays with sensors have enabled cross-talk–free spatial sensing. However, the thermal dependence of charge transport in semiconductors has resulted in interference between thermal and pressure stimuli. We develop multimodal sensor arrays based on three-dimensional integration of an active matrix to detect temperature and pressure independently. Our approach includes a calibrated compensation to decouple temperature and pressure signals. An individual pixel device consists of a TFT-based pressure sensor layered above a TFT-based temperature sensor. The detected temperature is used to compensate for the thermal effect on TFT-based pressure sensors. We develop large-area sensor arrays to enable accurate detection of two-dimensional pressure and temperature, leveraging these technologies to demonstrate advanced robotic grippers. The grippers stably grasp and lift a cup regardless of temperature, proving their possibility in skin-like electronic applications.