Hydrophobicity-promoted humidity-resistant ethanol sensors based on PTFE/Au/WO3 composite films

IF 3.7 1区化学 Q1 CHEMISTRY, ANALYTICAL Sensors and Actuators B: Chemical Pub Date : 2025-05-01 Epub Date: 2025-02-04 DOI:10.1016/j.snb.2025.137386

Xiaojie Zhu , Xueting Chang , Yingchang Jiang , Weixiang Gao , Shibin Sun

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Abstract

The ability of hydrophobic surfaces to repel water make them attractive for preparing humidity-resistant gas-sensing films. Herein, we deposited the Au nanoparticles and the polytetrafluoroethylene (PTFE) film onto the WO₃ film sequentially to form the PTFE/Au/WO₃ composite films by using methods of ion beam sputtering and radio-frequency (RF) magnetron sputtering. The PTFE/Au/WO₃ composite films-based gas sensors exhibited high sensitivity towards ethanol with fast response/recovery rate, wide detection range, good selectivity, and high stability. Due to the hydrophobic feature of the PTFE film, the PTFE/Au/WO₃ composite films-based gas sensors demonstrated promising humidity-tolerant properties, which achieved a high response retention of as high as 88.7 % as the relative humidity (RH) increased from 30 % to 90 %. This work provides a new strategy for the development of metal oxide semiconductor (MOS)-based gas sensors that can work effectively under high humidity.

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基于PTFE/Au/WO3复合膜的疏水促进抗湿乙醇传感器

疏水表面排斥水的能力使它们对制备抗湿气敏膜很有吸引力。本文采用离子束溅射和射频磁控溅射的方法，将Au纳米粒子和聚四氟乙烯（PTFE）薄膜依次沉积在WO3薄膜上，形成PTFE/Au/WO3复合薄膜。PTFE/Au/WO3复合膜气体传感器对乙醇具有高灵敏度、响应/回收率快、检测范围宽、选择性好、稳定性高等特点。由于PTFE膜的疏水性，PTFE/Au/WO3复合膜气体传感器表现出良好的耐湿性能，当相对湿度（RH）从30%增加到90%时，其响应保持率高达88.7%。这项工作为开发可在高湿条件下有效工作的金属氧化物半导体（MOS）气体传感器提供了新的策略。

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来源期刊

Sensors and Actuators B: Chemical 工程技术-电化学

CiteScore

14.60

自引率

11.90%

发文量

1776

审稿时长

3.2 months

期刊介绍： Sensors & Actuators, B: Chemical is an international journal focused on the research and development of chemical transducers. It covers chemical sensors and biosensors, chemical actuators, and analytical microsystems. The journal is interdisciplinary, aiming to publish original works showcasing substantial advancements beyond the current state of the art in these fields, with practical applicability to solving meaningful analytical problems. Review articles are accepted by invitation from an Editor of the journal.