Eloho Okotete , Stefan Mück , Subin Lee , Christoph Kirchlechner
{"title":"Evaluating neon ions as an alternative to gallium in micro cantilevers fracture testing","authors":"Eloho Okotete , Stefan Mück , Subin Lee , Christoph Kirchlechner","doi":"10.1016/j.scriptamat.2024.116509","DOIUrl":null,"url":null,"abstract":"<div><div>The influence of neon ions at the notch front as well as of annealing heat treatments on the fracture toughness of single crystalline silicon was investigated via microcantilever fracture testing. Using in situ scanning electron microscope deformation, the fracture toughness of the neon-notched cantilevers after annealing was measured, resulting in an average value of 1.0 MPa m<sup>0.5</sup>, proving that chemically inert gas ions can result in similar fracture toughness values as with Ga FIBs. However, Ne bubble formation was identified as substantial source of errors and we advise caution when interpreting fracture toughness measurements when using Ne as chemically inert ion species for notching.</div></div>","PeriodicalId":423,"journal":{"name":"Scripta Materialia","volume":"258 ","pages":"Article 116509"},"PeriodicalIF":5.3000,"publicationDate":"2024-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Scripta Materialia","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1359646224005426","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
The influence of neon ions at the notch front as well as of annealing heat treatments on the fracture toughness of single crystalline silicon was investigated via microcantilever fracture testing. Using in situ scanning electron microscope deformation, the fracture toughness of the neon-notched cantilevers after annealing was measured, resulting in an average value of 1.0 MPa m0.5, proving that chemically inert gas ions can result in similar fracture toughness values as with Ga FIBs. However, Ne bubble formation was identified as substantial source of errors and we advise caution when interpreting fracture toughness measurements when using Ne as chemically inert ion species for notching.
期刊介绍：
Scripta Materialia is a LETTERS journal of Acta Materialia, providing a forum for the rapid publication of short communications on the relationship between the structure and the properties of inorganic materials. The emphasis is on originality rather than incremental research. Short reports on the development of materials with novel or substantially improved properties are also welcomed. Emphasis is on either the functional or mechanical behavior of metals, ceramics and semiconductors at all length scales.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
