Analysis of the mobility behavior of MOS2 2D FETs

IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Solid-state Electronics Pub Date : 2025-02-01 Epub Date: 2024-11-28 DOI:10.1016/j.sse.2024.109032
Antonio Cerdeira , Magali Estrada , Ahmed Mounir , Tibor Grasser , Benjamín Iñiguez
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Abstract

In this work we analyze the behavior of 2D FETs, with channel length greater than the mean free path, and using MOCVD or CVD deposition method for the deposition of the 2D semiconductor layer, with different dielectric materials and EOTs. We show that transfer, output and conductance characteristics can be modeled with precision, considering the hopping transport mechanism as the predominant one, similarly to amorphous or polycrystalline TFTs. It was also observed that for the devices with channel length above one micrometer, mobility increased with the gate voltage as a power law. For channel lengths of 1 µm and 100 nm, mobility decreased with voltage, which in this case, can be attributed to other extrinsic effects, as the presence of high series resistance at the drain and source, which becomes more important as the channel length reduces, modifying its behavior with gate voltage.
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MOS2二维场效应管的迁移行为分析
在本工作中,我们分析了通道长度大于平均自由程的二维场效应管的行为,并使用MOCVD或CVD沉积方法沉积了不同介电材料和eot的二维半导体层。我们表明,考虑跳跃输运机制为主要机制,与非晶或多晶tft类似,转移、输出和电导特性可以精确地建模。对于沟道长度大于1微米的器件,迁移率随栅极电压呈幂律增加。对于沟道长度为1µm和100 nm的情况,迁移率随电压而下降,在这种情况下,可以归因于其他外在影响,如漏极和源极存在高串联电阻,随着沟道长度的减小,这变得更加重要,改变了其随栅极电压的行为。
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来源期刊
Solid-state Electronics
Solid-state Electronics 物理-工程:电子与电气
CiteScore
3.00
自引率
5.90%
发文量
212
审稿时长
3 months
期刊介绍: It is the aim of this journal to bring together in one publication outstanding papers reporting new and original work in the following areas: (1) applications of solid-state physics and technology to electronics and optoelectronics, including theory and device design; (2) optical, electrical, morphological characterization techniques and parameter extraction of devices; (3) fabrication of semiconductor devices, and also device-related materials growth, measurement and evaluation; (4) the physics and modeling of submicron and nanoscale microelectronic and optoelectronic devices, including processing, measurement, and performance evaluation; (5) applications of numerical methods to the modeling and simulation of solid-state devices and processes; and (6) nanoscale electronic and optoelectronic devices, photovoltaics, sensors, and MEMS based on semiconductor and alternative electronic materials; (7) synthesis and electrooptical properties of materials for novel devices.
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