Sudhanshu Tiwari, Anuj Ashok, Connor Devitt, Sunil A. Bhave, Renyuan Wang
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引用次数: 0
Abstract
Magnetostatic wave resonators based on yttrium iron garnet (YIG) are a promising technology platform for future communication filters. Such devices have demonstrated better quality factors than acoustic resonators in the 7 GHz range and above. However, the coupling coefficients of these resonators have been limited to less than 3%, primarily due to the restricted design space that is a result of microfabrication challenges related to the patterning of gadolinium gallium garnet (GGG), the substrate material used for growing single-crystal YIG. Here we report magnetostatic wave resonators created through the anisotropic etching of GGG substrates. Our approach, which is based on the YIG-on-GGG platform, uses a transducer with a hairclip-like structure. It is created by developing a microfabrication methodology that involves thinning and deep etching (up to 100 μm) of the GGG substrate. The resulting magnetostatic wave resonators exhibit a coupling of more than 8% in the 6–20 GHz frequency range.
期刊介绍：
Nature Electronics is a comprehensive journal that publishes both fundamental and applied research in the field of electronics. It encompasses a wide range of topics, including the study of new phenomena and devices, the design and construction of electronic circuits, and the practical applications of electronics. In addition, the journal explores the commercial and industrial aspects of electronics research.
The primary focus of Nature Electronics is on the development of technology and its potential impact on society. The journal incorporates the contributions of scientists, engineers, and industry professionals, offering a platform for their research findings. Moreover, Nature Electronics provides insightful commentary, thorough reviews, and analysis of the key issues that shape the field, as well as the technologies that are reshaping society.
Like all journals within the prestigious Nature brand, Nature Electronics upholds the highest standards of quality. It maintains a dedicated team of professional editors and follows a fair and rigorous peer-review process. The journal also ensures impeccable copy-editing and production, enabling swift publication. Additionally, Nature Electronics prides itself on its editorial independence, ensuring unbiased and impartial reporting.
In summary, Nature Electronics is a leading journal that publishes cutting-edge research in electronics. With its multidisciplinary approach and commitment to excellence, the journal serves as a valuable resource for scientists, engineers, and industry professionals seeking to stay at the forefront of advancements in the field.
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