Effects of bias voltage on the structure and ultrasonic response of LiNbO3 film transducers deposited by magnetron sputtering

IF 5.6 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS Ceramics International Pub Date : 2025-03-01 Epub Date: 2024-12-18 DOI:10.1016/j.ceramint.2024.12.274

Xiaomei Zeng , Xiangyu Zhang , Chang Xu , Zhong Zeng , Yangyang Yu , Alexander Tolstoguzov , Xiangdong Ma , Huayong Hu , Jun Zhang , Bing Yang , Sheng Liu , Vasiliy O. Pelenovich

{"title":"Effects of bias voltage on the structure and ultrasonic response of LiNbO3 film transducers deposited by magnetron sputtering","authors":"Xiaomei Zeng , Xiangyu Zhang , Chang Xu , Zhong Zeng , Yangyang Yu , Alexander Tolstoguzov , Xiangdong Ma , Huayong Hu , Jun Zhang , Bing Yang , Sheng Liu , Vasiliy O. Pelenovich","doi":"10.1016/j.ceramint.2024.12.274","DOIUrl":null,"url":null,"abstract":"<div><div>In this study, we deposited LiNbO<sub>3</sub> film ultrasonic transducers using RF magnetron sputtering technique. The effects of bias voltage applied to the samples, heat treatment, and deposition geometry on the structure, morphology, element distribution, phase composition, and piezoelectric properties of transducers were studied. The bias voltage significantly improves the uniformity of element distribution and partially suppresses the formation of secondary phases (LiNb<sub>3</sub>O<sub>8</sub>, NbO, and Nb<sub>2</sub>O<sub>5</sub>). The optimal bias value was within the range of 4–25 V, and higher bias voltages resulted in degradation of the transducer structure and piezoelectric performance. Short term heat treatment in air at 700 °C for 5 h significantly improved ultrasonic response. The influence of transducer thickness and tilt angle of columnar structure on piezoelectric response was also discussed. The maximum longitudinal and shear wave amplitudes were observed at tilt angles of 0 and ∼15 deg, respectively.</div></div>","PeriodicalId":267,"journal":{"name":"Ceramics International","volume":"51 7","pages":"Pages 8439-8445"},"PeriodicalIF":5.6000,"publicationDate":"2025-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ceramics International","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0272884224059327","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2024/12/18 0:00:00","PubModel":"Epub","JCR":"Q1","JCRName":"MATERIALS SCIENCE, CERAMICS","Score":null,"Total":0}

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Abstract

In this study, we deposited LiNbO₃ film ultrasonic transducers using RF magnetron sputtering technique. The effects of bias voltage applied to the samples, heat treatment, and deposition geometry on the structure, morphology, element distribution, phase composition, and piezoelectric properties of transducers were studied. The bias voltage significantly improves the uniformity of element distribution and partially suppresses the formation of secondary phases (LiNb₃O₈, NbO, and Nb₂O₅). The optimal bias value was within the range of 4–25 V, and higher bias voltages resulted in degradation of the transducer structure and piezoelectric performance. Short term heat treatment in air at 700 °C for 5 h significantly improved ultrasonic response. The influence of transducer thickness and tilt angle of columnar structure on piezoelectric response was also discussed. The maximum longitudinal and shear wave amplitudes were observed at tilt angles of 0 and ∼15 deg, respectively.

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偏置电压对磁控溅射制备LiNbO3薄膜换能器结构和超声响应的影响

本研究采用射频磁控溅射技术制备了LiNbO3薄膜超声换能器。研究了样品的偏置电压、热处理和沉积几何对换能器的结构、形貌、元素分布、相组成和压电性能的影响。偏置电压显著改善了元素分布的均匀性，部分抑制了二次相（LiNb3O8、NbO和Nb2O5）的形成。最佳偏置值在4 ~ 25 V范围内，过高的偏置电压会导致换能器结构和压电性能的退化。在700°C的空气中短期热处理5小时可显著改善超声响应。讨论了换能器厚度和柱状结构倾角对压电响应的影响。在倾角为0°和~ 15°时，观察到最大纵波和横波振幅。

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来源期刊

Ceramics International 工程技术-材料科学：硅酸盐

CiteScore

9.40

自引率

15.40%

发文量

4558

审稿时长

25 days

期刊介绍： Ceramics International covers the science of advanced ceramic materials. The journal encourages contributions that demonstrate how an understanding of the basic chemical and physical phenomena may direct materials design and stimulate ideas for new or improved processing techniques, in order to obtain materials with desired structural features and properties. Ceramics International covers oxide and non-oxide ceramics, functional glasses, glass ceramics, amorphous inorganic non-metallic materials (and their combinations with metal and organic materials), in the form of particulates, dense or porous bodies, thin/thick films and laminated, graded and composite structures. Process related topics such as ceramic-ceramic joints or joining ceramics with dissimilar materials, as well as surface finishing and conditioning are also covered. Besides traditional processing techniques, manufacturing routes of interest include innovative procedures benefiting from externally applied stresses, electromagnetic fields and energetic beams, as well as top-down and self-assembly nanotechnology approaches. In addition, the journal welcomes submissions on bio-inspired and bio-enabled materials designs, experimentally validated multi scale modelling and simulation for materials design, and the use of the most advanced chemical and physical characterization techniques of structure, properties and behaviour. Technologically relevant low-dimensional systems are a particular focus of Ceramics International. These include 0, 1 and 2-D nanomaterials (also covering CNTs, graphene and related materials, and diamond-like carbons), their nanocomposites, as well as nano-hybrids and hierarchical multifunctional nanostructures that might integrate molecular, biological and electronic components.