Design, Analysis, and Simulation of a MEMS Tuning Fork Gyroscope with a Mechanical Amplification Structure.

Abstract

This paper describes a novel micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG) design that employs a chevron-shaped displacement mechanism to amplify the displacement generated by the Coriolis force, thereby increasing the TFG's mechanical sensitivity. This approach was evaluated using both theoretical modeling and finite element analysis (FEA), and the results showed a high degree of agreement between the two methods. A conventional TFG having a comparable area was also designed and analyzed for comparison purposes. By introducing the displacement amplification mechanism, the proposed MEMS TFG design provides an output displacement about 2.5 times higher than the conventional design, according to the computation, without increasing the device footprint. Theoretical analysis and FEA on the TFG with amplification and a conventional TFG confirmed that the amplified displacement significantly improves the mechanical sensitivity of the gyroscope compared to conventional TFG designs.