J. Cañas, A. Grenier, J. L. Rouviere, A. Harikumar, S. Ndiaye, A. Jannaud, E. Monroy, L. Rigutti
{"title":"Assessment of the crystalline orientation of nanoscale semiconductor structures via atom probe tomography","authors":"J. Cañas, A. Grenier, J. L. Rouviere, A. Harikumar, S. Ndiaye, A. Jannaud, E. Monroy, L. Rigutti","doi":"10.1063/5.0242659","DOIUrl":null,"url":null,"abstract":"We demonstrate the application of atom probe tomography for assessing the crystalline orientation of nanoscale semiconductor structures via the analysis of charge state ratio maps in the detector space. The experimental realization is carried out in the context of adventitious cone-shaped domains present in AlGaN quantum dot superlattices. The cone-shaped domains, which emerge from shallow pits generated in AlN and propagate through the superlattices, are shown to exhibit small misorientation angles of their crystalline 〈0001〉 poles. The results of the atom probe tomography analysis are confirmed by convergent beam electron diffraction measurements. The use of this methodology adds another layer to the application of this technique to semiconductor nanoscale systems, providing not only compositional maps but also information on the crystallographic orientation.","PeriodicalId":8094,"journal":{"name":"Applied Physics Letters","volume":"17 1","pages":""},"PeriodicalIF":3.5000,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Physics Letters","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1063/5.0242659","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
引用次数: 0
Abstract
We demonstrate the application of atom probe tomography for assessing the crystalline orientation of nanoscale semiconductor structures via the analysis of charge state ratio maps in the detector space. The experimental realization is carried out in the context of adventitious cone-shaped domains present in AlGaN quantum dot superlattices. The cone-shaped domains, which emerge from shallow pits generated in AlN and propagate through the superlattices, are shown to exhibit small misorientation angles of their crystalline 〈0001〉 poles. The results of the atom probe tomography analysis are confirmed by convergent beam electron diffraction measurements. The use of this methodology adds another layer to the application of this technique to semiconductor nanoscale systems, providing not only compositional maps but also information on the crystallographic orientation.
期刊介绍：
Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology.
In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics.
APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field.
Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.
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