Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force Microscopy.

IF 1.5 4区 工程技术 Journal of Research of the National Institute of Standards and Technology Pub Date : 2009-08-01 Print Date: 2009-07-01 DOI:10.6028/jres.114.014
Shaw C Feng, Che Bong Joung, Theodore V Vorburger
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引用次数: 7

Abstract

This paper describes a detailed computational model of the interaction between an atomic force microscope probe tip and a sample surface. The model provides analyses of dynamic behaviors of the tip to estimate the probe deflections due to surface intermittent contact and the resulting dimensional biases and uncertainties. Probe tip and cantilever beam responses to intermittent contact between the probe tip and sample surface are computed using the finite element method. Intermittent contacts with a wall and a horizontal surface are computed and modeled, respectively. Using a 75 nm Critical Dimension (CD) tip as an example, the responses of the probe to interaction forces between the sample surface and the probe tip are shown in both time and frequency domains. In particular, interaction forces between the tip and both a vertical wall and a horizontal surface of a silicon sample are modeled using Lennard-Jones theory. The Snap-in and Snap-out of the probe tip in surface scanning are calculated and shown in the time domain. Based on the given tip-sample interaction force model, the calculation includes the compliance of the probe and dynamic forces generated by an excitation. Cantilever and probe tip deflections versus interaction forces in the time domain can be derived for both vertical contact with a plateau and horizontal contact with a side wall. Dynamic analysis using the finite element method and Lennard-Jones model provide a unique means to analyze the interaction of the probe and sample, including calculation of the deflection and the gap between the probe tip and the measured sample surface.

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临界维原子力显微镜中探针动态行为的表征。
本文描述了原子力显微镜探针尖端与样品表面相互作用的详细计算模型。该模型提供了尖端的动态行为分析,以估计由于表面间歇接触引起的探针挠度以及由此产生的尺寸偏差和不确定性。利用有限元法计算了探针尖端和悬臂梁对探针尖端与样品表面间歇接触的响应。与墙壁和水平表面的间歇接触分别进行了计算和建模。以75 nm临界尺寸(CD)探针为例,在时域和频域中显示了探针对样品表面和探针探针之间相互作用力的响应。特别地,尖端与硅样品的垂直壁和水平表面之间的相互作用力使用Lennard-Jones理论建模。计算了表面扫描中探针尖端的Snap-in和Snap-out,并在时域中显示。根据给定的探针-试样相互作用力模型,计算探针的柔度和激励产生的动力。对于与平台的垂直接触和与侧壁的水平接触,可以推导出悬臂梁和探针尖端挠度与相互作用力在时域中的关系。采用有限元法和Lennard-Jones模型的动态分析为分析探针与样品的相互作用提供了一种独特的手段,包括挠度和探针尖端与被测样品表面之间的间隙的计算。
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33.30%
发文量
10
期刊介绍: The Journal of Research of the National Institute of Standards and Technology is the flagship publication of the National Institute of Standards and Technology. It has been published under various titles and forms since 1904, with its roots as Scientific Papers issued as the Bulletin of the Bureau of Standards. In 1928, the Scientific Papers were combined with Technologic Papers, which reported results of investigations of material and methods of testing. This new publication was titled the Bureau of Standards Journal of Research. The Journal of Research of NIST reports NIST research and development in metrology and related fields of physical science, engineering, applied mathematics, statistics, biotechnology, information technology.
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