Guipeng Tie, Haifeng Zhou, Feng Shi, Jian Chen, Shuo Qiao, Ye Tian, Ci Song
{"title":"Equipment for in situ measurement of machining defects of large aperture optical elements","authors":"Guipeng Tie, Haifeng Zhou, Feng Shi, Jian Chen, Shuo Qiao, Ye Tian, Ci Song","doi":"10.1111/ijag.16593","DOIUrl":null,"url":null,"abstract":"<p>A set of in situ measurement equipment of large aperture strong light element based on the principle of laser scattering is established. The size and distribution of defects (damage points) can be judged by the laser scattering signal. The maximum scanning range is 700 mm*1000 mm. The type and size of defects are directly obtained by scanning the quartz sample with a diameter of 100 mm. The types of defects are pitting and scratches, and the width of the scratches and the diameter of the pitting are mostly in the range of 0–10μm. The processing time could reach 31.06s. The device can realize the on-line in situ measurement of large aperture optical elements, and has the advantages of fast response speed and high measurement accuracy.</p>","PeriodicalId":13850,"journal":{"name":"International Journal of Applied Glass Science","volume":null,"pages":null},"PeriodicalIF":2.1000,"publicationDate":"2022-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Applied Glass Science","FirstCategoryId":"88","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1111/ijag.16593","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, CERAMICS","Score":null,"Total":0}
引用次数: 0
Abstract
A set of in situ measurement equipment of large aperture strong light element based on the principle of laser scattering is established. The size and distribution of defects (damage points) can be judged by the laser scattering signal. The maximum scanning range is 700 mm*1000 mm. The type and size of defects are directly obtained by scanning the quartz sample with a diameter of 100 mm. The types of defects are pitting and scratches, and the width of the scratches and the diameter of the pitting are mostly in the range of 0–10μm. The processing time could reach 31.06s. The device can realize the on-line in situ measurement of large aperture optical elements, and has the advantages of fast response speed and high measurement accuracy.
期刊介绍：
The International Journal of Applied Glass Science (IJAGS) endeavors to be an indispensable source of information dealing with the application of glass science and engineering across the entire materials spectrum. Through the solicitation, editing, and publishing of cutting-edge peer-reviewed papers, IJAGS will be a highly respected and enduring chronicle of major advances in applied glass science throughout this century. It will be of critical value to the work of scientists, engineers, educators, students, and organizations involved in the research, manufacture and utilization of the material glass. Guided by an International Advisory Board, IJAGS will focus on topical issue themes that broadly encompass the advanced description, application, modeling, manufacture, and experimental investigation of glass.
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