E-H mode transitions and high-energy electron characteristics of helical antenna coupled plasma

IF 3.1 3区 物理与天体物理 Q2 PHYSICS, APPLIED Journal of Physics D: Applied Physics Pub Date : 2021-05-10 DOI:10.1088/1361-6463/abff7a
Chuansheng Wang, Xin Lin, Fei Li, Xilong Yu
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引用次数: 1

Abstract

Metastable and high-energy electron characteristics obtained from optical emission spectroscopy are used to analyze the dependence of the H mode on the magnetic field strength and discharge pressure. The results show that the H-mode characteristics gradually appears as the magnetic field strength is increased, the reason being that electrons undergo multiple acceleration-collision cycles at high magnetic field strength, thereby the metastable ionization will be increased. This improves energy utilization and making the H mode appearing. The variation in the density of metastable states and the Langmuir probe data shows that the electron energy distribution function evolves from non-Maxwellian to Maxwellian. The radial constraint of the magnetic field to the electrons and thus reduces the electron heating efficiency. Moreover, the increase in electric field strength with magnetic field leads to an increase in energy obtained by the electrons per unit distance. The competition between the two makes the number of high-energy electrons decrease rapidly first, and then increase slowly with magnetic field strength increasing. The turning point increases with the increase of discharge pressure and radio-frequency (RF) power. And the higher the pressure the lower the high-energy electron. For fields between 105.5 G and 212.7 G. In the H-mode regime, and with increasing RF power, the number of high-energy electrons will be sudden rise after experiencing a steady increase. The sudden rise RF power increase with magnetic field and decrease with discharge pressure increase. However, at high magnetic fields (>265 G) and high power (>450 W), the high-energy electron density decreases with power increasing.
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螺旋天线耦合等离子体的E-H模跃迁与高能电子特性
利用从光学发射光谱中获得的亚稳态和高能电子特性来分析H模对磁场强度和放电压力的依赖性。结果表明,随着磁场强度的增加,H模特性逐渐出现,原因是电子在高磁场强度下经历多次加速碰撞循环,从而增加亚稳态电离。这提高了能量利用率并使H模式出现。亚稳态密度和Langmuir探针数据的变化表明,电子能量分布函数从非麦克斯韦态演化为麦克斯韦态。磁场对电子的径向约束,从而降低了电子加热效率。此外,电场强度随磁场的增加导致每单位距离电子获得的能量增加。两者之间的竞争使得高能电子的数量先快速减少,然后随着磁场强度的增加而缓慢增加。转折点随着放电压力和射频功率的增加而增加。压力越高,高能电子就越低。对于105.5G和212.7G之间的场,在H模式区域,随着RF功率的增加,高能电子的数量在经历稳定增加后将突然增加。突增射频功率随磁场的增大而增大,随放电压力的增大而减小。然而,在高磁场(>265G)和高功率(>450W)下,高能电子密度随着功率的增加而降低。
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来源期刊
Journal of Physics D: Applied Physics
Journal of Physics D: Applied Physics 物理-物理:应用
CiteScore
6.80
自引率
8.80%
发文量
835
审稿时长
2.1 months
期刊介绍: This journal is concerned with all aspects of applied physics research, from biophysics, magnetism, plasmas and semiconductors to the structure and properties of matter.
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