Beam Shaping the Direct Laser Interference Patterning Spot

IF 0.8 4区 材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Journal of Laser Micro Nanoengineering Pub Date : 2022-07-01 DOI:10.2961/jlmn.2022.01.2007
L. Pongratz, K. Vannahme
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Abstract

Direct Laser Interference Patterning (DLIP) using ultrashort pulsed laser sources is a single-step process to produce micro- and nanostructured surfaces by ablation. Spatial periods of a few micrometers are patterned using a laser scanner system with two interfering beams. In this study, the field of DLIP processing is expanded by handling spatial periods in the range of 1 µm and below. Precise periodic ablation is achieved with an optical setup tailored for a homogenous topography of spatial periods in the micro and sub-micrometer range. The lateral intensity distribution of the interference area used for ablation is shaped using beam shapers in order to achieve a homogenous intensity distribution and hence increase the homogeneity of the periodic texture in the ablated area. The shape of the interference area is formed into a square profile for the purpose of seamless stitching plenty of to be processed areas. This creates large area periodic textures with high homogeneity. Two beams with ultrashort laser pulses of 10 ps duration and a wavelength of 532 nm are used to structure line-like periodic surface textures with spatial periods of 650 nm. The beam shaping elements modify the lateral intensity distribution in the interference area and the affiliated profile. This enables precise patterning of tool steels with spatial periods in sub-micrometer range for applications in the field of life science surfaces.
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直接激光干涉图案点的光束整形
使用超短脉冲激光源的直接激光干涉图案(DLIP)是通过烧蚀产生微纳米结构表面的单步工艺。几微米的空间周期是利用激光扫描系统与两个干涉光束图像化。在本研究中,通过处理1µm及以下的空间周期,扩展了DLIP处理领域。精确的周期性烧蚀是通过为微米和亚微米范围内空间周期的均匀地形量身定制的光学装置来实现的。用于烧蚀的干涉区域的横向强度分布使用光束成形器进行成形,以实现均匀的强度分布,从而增加烧蚀区域周期性织构的均匀性。干涉区的形状形成方形轮廓,以便无缝拼接大量待加工区域。这将创建具有高均匀性的大面积周期性纹理。利用波长为532 nm、持续时间为10 ps的两束超短激光脉冲,构建了空间周期为650 nm的线状周期性表面织构。光束整形元件改变干涉区和附属剖面中的横向强度分布。这使得在亚微米范围内空间周期的工具钢的精确图案在生命科学领域的应用表面。
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来源期刊
Journal of Laser Micro Nanoengineering
Journal of Laser Micro Nanoengineering 工程技术-材料科学:综合
CiteScore
1.90
自引率
9.10%
发文量
18
审稿时长
3 months
期刊介绍: Journal of Laser Micro/Nanoengineering, founded in 2005 by Japan Laser Processing Society (JLPS), is an international online journal for the rapid publication of experimental and theoretical investigations in laser-based technology for micro- and nano-engineering. Access to the full article is provided free of charge. JLMN publishes regular articles, technical communications, and invited papers about new results related to laser-based technology for micro and nano engineering. The articles oriented to dominantly technical or industrial developments containing interesting and useful information may be considered as technical communications.
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