Single-color peripheral photoinhibition lithography of nanophotonic structures
Minfei He, Zhimin Zhang, Chun Cao, Yiwei Qiu, Xiaoming Shen, Guozun Zhou, Z. Cai, Xinjie Sun, Xin He, Liang Xu, Xi Liu, Chenliang Ding, Yaoyu Cao, C. Kuang, Xu Liu
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引用次数: 6
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