CO2-Laser Flash Evaporation as Novel CVD Precursor Delivery System for Functional Thin Film Growth†

Abstract

A novel approach for functional thin film deposition using laser flash evaporation as the precursor delivery system is reported. In this newly established CO₂-laser-assisted (LA)CVD, solid precursors with low volatility are non-selectively sublimated by absorption of infrared laser radiation. Thus, the method allows for the highly controlled growth of multicomponent thin films with desired composition and stoichiometry over the entire growth period. Thin film microstructural features, such as the morphology, density, and thickness of the films can be adjusted by tuning the process parameters. These features, characterized by means of scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy (RS), are discussed for LiCoO₂ thin films. Additional analyses include X-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectrometry (ICP-OES), cyclic voltammetry (CV), and galvanostatic cycling.