Giorgio Carraro, Alberto Gasparotto, Chiara Maccato, Elza Bontempi, Davide Barreca
{"title":"PECVD of Hematite Nanoblades and Nanocolumns: Synthesis, Characterization, and Growth Model†","authors":"Giorgio Carraro, Alberto Gasparotto, Chiara Maccato, Elza Bontempi, Davide Barreca","doi":"10.1002/cvde.201507182","DOIUrl":null,"url":null,"abstract":"<div>\n \n <section>\n \n <p>Fe<sub>2</sub>O<sub>3</sub> nanostructures are fabricated on Si(100) and SiO<sub>2</sub> by plasma enhanced (PE)CVD from a Fe<sup>III</sup> <i>β</i>-diketonate precursor. Depositions are carried out in Ar-O<sub>2</sub> plasmas, devoting particular attention to the influence of growth temperature (from 60 to 400 °C) on material chemico-physical properties. Remarkably, high purity, single-phase <i>α</i>-Fe<sub>2</sub>O<sub>3</sub> nanostructures are obtained at temperatures as low as 60 °C. Furthermore, the deposit nano-organization can be tuned from <110>-oriented 2D nanoblade arrays to denser nanocolumns upon increasing the deposition temperature. A possible growth model is proposed to account for the observed structural/morphological features and light absorption properties of the target materials.</p>\n </section>\n </div>","PeriodicalId":10093,"journal":{"name":"Chemical Vapor Deposition","volume":"21 10-11-12","pages":"294-299"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1002/cvde.201507182","citationCount":"13","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Chemical Vapor Deposition","FirstCategoryId":"1085","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/cvde.201507182","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 13
Abstract
Fe2O3 nanostructures are fabricated on Si(100) and SiO2 by plasma enhanced (PE)CVD from a FeIIIβ-diketonate precursor. Depositions are carried out in Ar-O2 plasmas, devoting particular attention to the influence of growth temperature (from 60 to 400 °C) on material chemico-physical properties. Remarkably, high purity, single-phase α-Fe2O3 nanostructures are obtained at temperatures as low as 60 °C. Furthermore, the deposit nano-organization can be tuned from <110>-oriented 2D nanoblade arrays to denser nanocolumns upon increasing the deposition temperature. A possible growth model is proposed to account for the observed structural/morphological features and light absorption properties of the target materials.
期刊介绍：
Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews. All papers are peer-reviewed. The journal provides a unified forum for chemists, physicists, and engineers whose publications on chemical vapor deposition have in the past been spread over journals covering inorganic chemistry, materials chemistry, organometallics, applied physics and semiconductor technology, thin films, and ceramic processing.
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