Hybrid Synergic Methodology to Prepare ALD Honey-Comb Anatase Films

Francesca Visentin, Naida El Habra, Monica Favaro, Simone Battiston, Rosalba Gerbasi, Laura Crociani, Alessandro Galenda
{"title":"Hybrid Synergic Methodology to Prepare ALD Honey-Comb Anatase Films","authors":"Francesca Visentin,&nbsp;Naida El Habra,&nbsp;Monica Favaro,&nbsp;Simone Battiston,&nbsp;Rosalba Gerbasi,&nbsp;Laura Crociani,&nbsp;Alessandro Galenda","doi":"10.1002/cvde.201507183","DOIUrl":null,"url":null,"abstract":"<div>\n \n <section>\n \n <p>Macroporous inorganic structures with high surface-to-volume ratio have been recognized as a centre of interest in many fields. Here, attention is focused on a hybrid synergic methodology to prepare honey-comb (HC) anatase TiO<sub>2</sub> films with increased specific surface area. The breath figures (BFs) method is exploited to produce HC polystyrene (PS) templates and atomic layer deposition (ALD) is used to conformally cover them with a TiO<sub>2</sub> coating. Different approaches are tested to preserve the HC-TiO<sub>2</sub> structure during the conversion of the hybrid organic/inorganic materials into crystalline anatase films. Best results are obtained operating with ALD at 180 °C on pre-UV cross-linked substrates.</p>\n </section>\n </div>","PeriodicalId":10093,"journal":{"name":"Chemical Vapor Deposition","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2015-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1002/cvde.201507183","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Chemical Vapor Deposition","FirstCategoryId":"1085","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/cvde.201507183","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

Abstract

Macroporous inorganic structures with high surface-to-volume ratio have been recognized as a centre of interest in many fields. Here, attention is focused on a hybrid synergic methodology to prepare honey-comb (HC) anatase TiO2 films with increased specific surface area. The breath figures (BFs) method is exploited to produce HC polystyrene (PS) templates and atomic layer deposition (ALD) is used to conformally cover them with a TiO2 coating. Different approaches are tested to preserve the HC-TiO2 structure during the conversion of the hybrid organic/inorganic materials into crystalline anatase films. Best results are obtained operating with ALD at 180 °C on pre-UV cross-linked substrates.

查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
复合协同法制备ALD蜂窝锐钛矿膜
具有高表面体积比的大孔无机结构已成为许多领域的研究热点。在这里,我们的注意力集中在一种混合协同方法上,以制备具有增加比表面积的蜂窝(HC)锐钛矿TiO2薄膜。利用呼吸图(BFs)方法生产HC聚苯乙烯(PS)模板,并使用原子层沉积(ALD)在其上覆盖TiO2涂层。在有机/无机杂化材料转化为锐钛矿晶体薄膜的过程中,测试了不同的方法来保持HC-TiO2结构。在预uv交联底物上使用ALD在180°C下操作获得最佳结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
Chemical Vapor Deposition
Chemical Vapor Deposition 工程技术-材料科学:膜
自引率
0.00%
发文量
0
审稿时长
>12 weeks
期刊介绍: Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews. All papers are peer-reviewed. The journal provides a unified forum for chemists, physicists, and engineers whose publications on chemical vapor deposition have in the past been spread over journals covering inorganic chemistry, materials chemistry, organometallics, applied physics and semiconductor technology, thin films, and ceramic processing.
期刊最新文献
Low Temperature PureB Technology for CMOS Compatible Photodetectors From V. B. Aleskovskii's “Framework” Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition† Farewell and Welcome Chem. Vap. Deposition (10–11–12/2015) Numerical Modeling of the Droplet Vaporization for Design and Operation of Liquid-pulsed CVD
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1