Electromigration in Power Devices: A Combined Effect of Electromigration and Thermal Migration

H. Zhuang, R. Bauer, M. Dinkel
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Abstract

In the power semiconductor industry, there is continuous development toward higher maximum current capability of devices while device dimensions shrink. This leads to an increase in current density which the devices have to handle, and raises the question if electromigration (EM) is a critical issue here. Generally, an EM failure can be described by the Black’s equation with temperature and current density as the main influencing factors. Normally, the current that the power packages need to handle lies in the range of 100 A. However, it should be noted that power devices exhibit asymmetric sizes of drain and source contacts. This may lead to higher current density at the source leads (area ratio drain/source: ~9× for PQFN 5 × 6). Nevertheless, the source lead area is still much larger than that of the flip chip bumps (i.e., 28 times larger than a 100-μm microbump). This typically enhances the safety of the power device with respect to EM. However, with regard to future development toward higher maximum current capability, we intended to investigate further on the EM of power devices. In the present work, we focused on the PQFN 5 × 6 package to study the EM behavior of a power device soldered on a printed circuit board (PCB). We employed the highest current (120 A) and temperature (150°C) that the stress test system could handle to study EM in accelerated mode. First fails occurred after ~1,200 h, which was much earlier than expected from previous flip-chip investigations. In addition, we found separation gaps in the solder joint between drain contact and PCB, which experienced the lowest current density in the whole test. Contradictorily, we observed only minor solder degradation at the source interface, regardless of the higher current density there. Nevertheless, the separating metal interfaces still correlated well with the current direction. Thermal simulations revealed that due to the self-heating of the device by the high current applied, both the drain and source leads were exposed to much higher temperatures (Tmax = 168°C) than the PCB board which was kept under temperature control at 150°C. This temperature difference resulted in a thermal gradient between the device and PCB, which, in turn, triggered thermal migration (TM) in addition to EM. As TM for the drain contact occurred in the same direction as EM, it enhanced the degradation effect and therefore led to a shorter time-to-failure at the drain. In contrast to this, such an enhanced effect did not occur at the source side. As a result, we observed higher solder degradation at the drain side, which we did confirm by switching the current direction in the test. To minimize the TM effect, a special EM test vehicle, which used a Cu plate instead of the metal-oxide-semiconductor field-effect transistor chip, was designed and fabricated. Thermal simulation verified that the device operated at similar temperatures as the PCB board. Using this setup, it was possible to study EM in an accelerated mode and, thus, investigate the pure EM behavior of the power device.
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功率器件中的电迁移:电迁移和热迁移的综合效应
在功率半导体工业中,器件尺寸不断缩小的同时,器件的最大电流能力也在不断提高。这导致器件必须处理的电流密度增加,并提出了电迁移(EM)是否在这里是一个关键问题的问题。一般来说,电磁失效可以用布莱克方程来描述,温度和电流密度是主要的影响因素。正常情况下,电源包需要处理的电流在100a范围内。然而,应该注意的是,功率器件的漏极和源极触点尺寸不对称。这可能导致源引线处的电流密度更高(PQFN 5 × 6的漏极/源极面积比为~9倍)。然而,源引线面积仍然比倒装芯片的凸起大得多(即比100 μm微凸起大28倍)。这通常会提高功率器件在电磁方面的安全性。然而,考虑到未来向更高最大电流能力的发展,我们打算进一步研究功率器件的电磁。本文以PQFN 5 × 6封装为研究对象,研究了功率器件焊接在印刷电路板(PCB)上的电磁行为。我们采用应力测试系统可以处理的最高电流(120 A)和温度(150°C)来研究加速模式下的电磁辐射。第一次失效发生在~ 1200小时后,这比以前的倒装芯片研究预期的要早得多。此外,我们发现漏极触点与PCB之间的焊点存在分离间隙,这是整个测试中电流密度最低的。矛盾的是,我们在源界面只观察到轻微的焊料退化,而不管那里的电流密度高。尽管如此,分离的金属界面仍然与电流方向有很好的相关性。热模拟表明,由于施加的大电流使器件自热,漏极和源极引线都暴露在比保持在150°C温度控制下的PCB板更高的温度下(Tmax = 168°C)。这种温差导致器件和PCB之间的热梯度,进而引发热迁移(TM)和EM。由于漏极接触的TM发生在与EM相同的方向,因此它增强了降解效果,因此导致漏极失效时间更短。与此相反,这种增强的效果并没有发生在源侧。结果,我们在漏极侧观察到更高的焊料劣化,我们确实通过在测试中切换电流方向来证实这一点。为了最大限度地减少TM效应,设计并制造了一种特殊的EM测试车,该测试车采用Cu板代替金属氧化物半导体场效应晶体管芯片。热模拟验证了该器件在与PCB板相似的温度下工作。使用这种设置,可以在加速模式下研究电磁,从而研究功率器件的纯电磁行为。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Journal of Microelectronics and Electronic Packaging
Journal of Microelectronics and Electronic Packaging Engineering-Electrical and Electronic Engineering
CiteScore
1.30
自引率
0.00%
发文量
5
期刊介绍: The International Microelectronics And Packaging Society (IMAPS) is the largest society dedicated to the advancement and growth of microelectronics and electronics packaging technologies through professional education. The Society’s portfolio of technologies is disseminated through symposia, conferences, workshops, professional development courses and other efforts. IMAPS currently has more than 4,000 members in the United States and more than 4,000 international members around the world.
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