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Study on the Manufacturability of X Dimension Fan Out Integration Package with Organic RDLs (XDFOI-O) 带有机 RDL 的 X 尺寸扇出集成封装(XDFOI-O)的可制造性研究
Q4 Engineering Pub Date : 2024-01-01 DOI: 10.4071/001c.115496
Haijie Chen, Ziyao Bian, Tao Liu, Jielei Xie, Jingyu Wu, Yaojian Lin, Choon Heung Lee
The concept of chiplet was proposed in the post- Moore era. How to layout the multiple chips with different processes and sizes in the package structure is a problem that needs to be considered as different layouts may significantly affect the manufacturability during the packaging process. XDFOI-O is a 2.5D organic interposer structure with a significant coefficient of thermal expansion mismatch in it. Different layouts may cause excessive stress concentration in the package structure, as well as large wafer warpage, which can affect the normal operations of the production line. Stress accumulation on specific chiplet during the wafer thinning process is another manufacturability problem, leading to chip cracking. Prospective finite element analysis can be applied to evaluate the various layouts. In simulation work, different placement processes of dummy chips as stiffeners, as well as different chiplet thicknesses and underfill coverage, can be used as factors for simulation studies, thereby making a reference for further chiplet package design.
芯片的概念是在后摩尔时代提出的。如何在封装结构中布局不同工艺和尺寸的多个芯片是一个需要考虑的问题,因为不同的布局可能会严重影响封装过程中的可制造性。XDFOI-O 是一种 2.5D 有机插层结构,其热膨胀系数存在明显的不匹配。不同的布局可能会导致封装结构中的应力过度集中,以及较大的晶片翘曲,从而影响生产线的正常运行。晶片减薄过程中特定芯片上的应力累积是另一个可制造性问题,会导致芯片开裂。前瞻性有限元分析可用于评估各种布局。在模拟工作中,可将作为加强筋的假芯片的不同放置过程以及不同的芯片厚度和底部填充覆盖率作为模拟研究的因素,从而为进一步的芯片封装设计提供参考。
{"title":"Study on the Manufacturability of X Dimension Fan Out Integration Package with Organic RDLs (XDFOI-O)","authors":"Haijie Chen, Ziyao Bian, Tao Liu, Jielei Xie, Jingyu Wu, Yaojian Lin, Choon Heung Lee","doi":"10.4071/001c.115496","DOIUrl":"https://doi.org/10.4071/001c.115496","url":null,"abstract":"The concept of chiplet was proposed in the post- Moore era. How to layout the multiple chips with different processes and sizes in the package structure is a problem that needs to be considered as different layouts may significantly affect the manufacturability during the packaging process. XDFOI-O is a 2.5D organic interposer structure with a significant coefficient of thermal expansion mismatch in it. Different layouts may cause excessive stress concentration in the package structure, as well as large wafer warpage, which can affect the normal operations of the production line. Stress accumulation on specific chiplet during the wafer thinning process is another manufacturability problem, leading to chip cracking. Prospective finite element analysis can be applied to evaluate the various layouts. In simulation work, different placement processes of dummy chips as stiffeners, as well as different chiplet thicknesses and underfill coverage, can be used as factors for simulation studies, thereby making a reference for further chiplet package design.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":"34 5","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140526454","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
AlGaN High Electron Mobility Transistor for High-Temperature Logic 高温逻辑用高电子迁移率晶体管
Q4 Engineering Pub Date : 2023-11-07 DOI: 10.4071/imaps.1832996
B. Klein, A. Allerman, A. Baca, C. Nordquist, A. Armstrong, M. V. Van Heukelom, A. Rice, V. Patel, M. Rosprim, L. Caravello, R. DeBerry, J. Pipkin, V. Abate, R. Kaplar
We report on AlGaN HEMT-based logic development, using combined enhancement- and depletion-mode transistors to fabricate inverters with operation from room temperature up to 500°C. Our development approach included: (a) characterizing temperature dependent carrier transport for different AlGaN HEMT heterostructures, (b) developing a suitable gate metal scheme for use in high temperatures, and (c) over-temperature testing of discrete devices and inverters. Hall mobility data revealed the GaN-channel HEMT experienced a 6.9× reduction in mobility, whereas the AlGaN channel HEMTs experienced about a 3.1x reduction. Furthermore, a greater aluminum contrast between the barrier and channel enabled higher carrier densities in the two-dimensional electron gas for all temperatures. The combination of reduced variation in mobility with temperature and high sheet carrier concentration showed that an Al-rich AlGaN-channel HEMT with a high barrier-to-channel aluminum contrast is the best option for an extreme temperature HEMT design. Three gate metal stacks were selected for low resistivity, high melting point, low thermal expansion coefficient, and high expected barrier height. The impact of thermal cycling was examined through electrical characterization of samples measured before and after rapid thermal anneal. The 200 nm tungsten gate metallization was the top performer with minimal reduction in drain current, a slightly positive threshold voltage shift, and about an order of magnitude advantage over the other gates in on-to-off current ratio. After incorporating the tungsten gate metal stack in device fabrication, characterization of transistors and inverters from room temperature up to 500°C was performed. The enhancement-mode (e-mode) devices’ resistance started increasing at about 200°C, resulting in drain current degradation. This phenomenon was not observed in depletion-mode (d-mode) devices but highlights a challenge for inverters in an e-mode driver and d-mode load configuration.
{"title":"AlGaN High Electron Mobility Transistor for High-Temperature Logic","authors":"B. Klein, A. Allerman, A. Baca, C. Nordquist, A. Armstrong, M. V. Van Heukelom, A. Rice, V. Patel, M. Rosprim, L. Caravello, R. DeBerry, J. Pipkin, V. Abate, R. Kaplar","doi":"10.4071/imaps.1832996","DOIUrl":"https://doi.org/10.4071/imaps.1832996","url":null,"abstract":"We report on AlGaN HEMT-based logic development, using combined enhancement- and depletion-mode transistors to fabricate inverters with operation from room temperature up to 500°C. Our development approach included: (a) characterizing temperature dependent carrier transport for different AlGaN HEMT heterostructures, (b) developing a suitable gate metal scheme for use in high temperatures, and (c) over-temperature testing of discrete devices and inverters. Hall mobility data revealed the GaN-channel HEMT experienced a 6.9× reduction in mobility, whereas the AlGaN channel HEMTs experienced about a 3.1x reduction. Furthermore, a greater aluminum contrast between the barrier and channel enabled higher carrier densities in the two-dimensional electron gas for all temperatures. The combination of reduced variation in mobility with temperature and high sheet carrier concentration showed that an Al-rich AlGaN-channel HEMT with a high barrier-to-channel aluminum contrast is the best option for an extreme temperature HEMT design. Three gate metal stacks were selected for low resistivity, high melting point, low thermal expansion coefficient, and high expected barrier height. The impact of thermal cycling was examined through electrical characterization of samples measured before and after rapid thermal anneal. The 200 nm tungsten gate metallization was the top performer with minimal reduction in drain current, a slightly positive threshold voltage shift, and about an order of magnitude advantage over the other gates in on-to-off current ratio. After incorporating the tungsten gate metal stack in device fabrication, characterization of transistors and inverters from room temperature up to 500°C was performed. The enhancement-mode (e-mode) devices’ resistance started increasing at about 200°C, resulting in drain current degradation. This phenomenon was not observed in depletion-mode (d-mode) devices but highlights a challenge for inverters in an e-mode driver and d-mode load configuration.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":"16 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"70525905","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Novel Approach for Characterizing Epoxy Mold Compound High Temperature Swelling 表征环氧模塑料高温溶胀的新方法
Q4 Engineering Pub Date : 2023-10-01 DOI: 10.4071/001c.91225
Ian Chin, Wei Keat Loh, Mohd Zulkifly Bin Abdullah
In this paper, a novel method for measuring hightemperature material swelling of an epoxy mold compound is explored. This work attempts to extend the swelling characterization beyond the capability of typical commercial tools. The approach uses a high-pressure chamber to maintain a saturated liquid environment for the specimen. Digital image correlation is used to measure in-situ strain change in the specimen due to hygro-thermal expansion. The results show moisture-induced swelling increases with temperature and is significant compared with thermal expansion. Results are compared against other measurement methods and published data. This has yielded good fundamental learnings for the novel concept and identified areas for future work.
本文探讨了一种测量环氧树脂模具化合物高温材料膨胀的新方法。这项工作试图将膨胀表征的范围扩大到典型商用工具所无法达到的程度。该方法使用高压室来维持试样的饱和液体环境。数字图像相关性用于测量试样因湿热膨胀而产生的原位应变变化。结果表明,湿气引起的膨胀随温度升高而增加,与热膨胀相比非常显著。结果与其他测量方法和公布的数据进行了比较。这为新概念提供了良好的基础知识,并确定了未来工作的领域。
{"title":"A Novel Approach for Characterizing Epoxy Mold Compound High Temperature Swelling","authors":"Ian Chin, Wei Keat Loh, Mohd Zulkifly Bin Abdullah","doi":"10.4071/001c.91225","DOIUrl":"https://doi.org/10.4071/001c.91225","url":null,"abstract":"In this paper, a novel method for measuring hightemperature material swelling of an epoxy mold compound is explored. This work attempts to extend the swelling characterization beyond the capability of typical commercial tools. The approach uses a high-pressure chamber to maintain a saturated liquid environment for the specimen. Digital image correlation is used to measure in-situ strain change in the specimen due to hygro-thermal expansion. The results show moisture-induced swelling increases with temperature and is significant compared with thermal expansion. Results are compared against other measurement methods and published data. This has yielded good fundamental learnings for the novel concept and identified areas for future work.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":"213 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139325305","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dual-Band Dual-Polarized Antennas for 5G mmWave Base Stations 用于 5G 毫米波基站的双频双极化天线
Q4 Engineering Pub Date : 2023-10-01 DOI: 10.4071/001c.91214
T. H. Le, Ivan Ndip, Martin Schneider-Ramelow
In this paper, we present a systematic approach for the development of application-specific antennas for 5G millimeter-wave (mmWave) base stations. First, an in-depth analysis of 5G mmWave base stations considering the required antenna gain and antenna elements to address different equivalent isotropic radiated power requirements is presented. This is followed by an evaluation of the realistic impact of different factors, which affect mmWave communication, namely output power of power amplifiers, antenna gain, losses and weather condition (rain), on transmission ranges between base station and terminals, considering the link budget analysis for an Urban Macro cell with the Non-Line-of-Sight transmission, as an example. Finally, based on a comparative analysis of published dual-band dual-polarized 5G mmWave antennas, we propose a novel configuration of a dual-band dual-polarized antenna for 5G mmWave base station applications, which overcomes the limitations of conventional antennas in published literature. Our proposed antenna covers the specified 3GHz bandwidths in the 5G mmWave n257 and n260 bands and reaches approximately 6 and 6.7 dBi, respectively in these bands. Furthermore, it exhibits at least 20 dB isolation between the polarizations and has dimensions of 1.831.83 1.2 mm. We modeled, simulated, fabricated, measured and analyzed this new antenna configuration. Excellent correlation is obtained between measurement and simulation results.
在本文中,我们介绍了一种为 5G 毫米波(mmWave)基站开发特定应用天线的系统方法。首先,本文对 5G 毫米波基站进行了深入分析,考虑了所需的天线增益和天线元件,以满足不同的等效各向同性辐射功率要求。随后,以非线性传输的城市宏蜂窝的链路预算分析为例,评估了影响毫米波通信的不同因素(即功率放大器的输出功率、天线增益、损耗和天气条件(雨))对基站和终端之间传输距离的实际影响。最后,在对已发表的双频双极化 5G 毫米波天线进行比较分析的基础上,我们为 5G 毫米波基站应用提出了一种新颖的双频双极化天线配置,克服了已发表文献中传统天线的局限性。我们提出的天线覆盖了 5G 毫米波 n257 和 n260 波段中指定的 3GHz 带宽,在这些波段中分别达到约 6 和 6.7 dBi。此外,它的极化间隔离度至少为 20 dB,尺寸为 1.831.83 1.2 mm。我们对这种新型天线配置进行了建模、模拟、制造、测量和分析。测量结果与模拟结果之间具有极好的相关性。
{"title":"Dual-Band Dual-Polarized Antennas for 5G mmWave Base Stations","authors":"T. H. Le, Ivan Ndip, Martin Schneider-Ramelow","doi":"10.4071/001c.91214","DOIUrl":"https://doi.org/10.4071/001c.91214","url":null,"abstract":"In this paper, we present a systematic approach for the development of application-specific antennas for 5G millimeter-wave (mmWave) base stations. First, an in-depth analysis of 5G mmWave base stations considering the required antenna gain and antenna elements to address different equivalent isotropic radiated power requirements is presented. This is followed by an evaluation of the realistic impact of different factors, which affect mmWave communication, namely output power of power amplifiers, antenna gain, losses and weather condition (rain), on transmission ranges between base station and terminals, considering the link budget analysis for an Urban Macro cell with the Non-Line-of-Sight transmission, as an example. Finally, based on a comparative analysis of published dual-band dual-polarized 5G mmWave antennas, we propose a novel configuration of a dual-band dual-polarized antenna for 5G mmWave base station applications, which overcomes the limitations of conventional antennas in published literature. Our proposed antenna covers the specified 3GHz bandwidths in the 5G mmWave n257 and n260 bands and reaches approximately 6 and 6.7 dBi, respectively in these bands. Furthermore, it exhibits at least 20 dB isolation between the polarizations and has dimensions of 1.831.83 1.2 mm. We modeled, simulated, fabricated, measured and analyzed this new antenna configuration. Excellent correlation is obtained between measurement and simulation results.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":"239 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139329673","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An Evaluation on the Mechanical and Conductive Performance of Electrically Conductive Film Adhesives with Glass Fabric Carriers 以玻璃纤维为载体的导电膜胶粘剂的机械性能和导电性能评价
Q4 Engineering Pub Date : 2023-07-01 DOI: 10.4071/001c.88424
Weiyu Zhang, Yuan Zhao, Zhongwei Liu, Stone Cheng
Conductive assembly film adhesives are extensively employed in medical, telecom, aerospace, and defense systems. Glass fabric cloth is frequently utilized as the carrier in many film adhesives to enhance handling and processability during electronic device assembly. Furthermore, practical applications have shown that film adhesives with glass fabric carriers can bond adherends with severely mismatched coefficients of thermal expansion. However, the impact of embedding glass fabric on the overall performance of assembly films has not been systematically investigated. To address this gap in knowledge, a study was conducted to compare the performance of electrically conductive film adhesives with and without the glass fabric carriers. The study focused on the mechanical performance of the film adhesives, including lap shear strength, tensile modulus, and the ability to manage applications with mismatched coefficients of thermal expansion. Additionally, the study assessed the impact of the carrier on the electrical and thermal conductivity of the film adhesives. Overall, this integrated assessment provides insights into the effectiveness of the glass fabric carrier on the performance of film adhesives.
导电组装膜粘合剂广泛应用于医疗、电信、航空航天和国防系统。在电子设备组装过程中,玻璃布经常被用作薄膜粘合剂的载体,以提高其可加工性。此外,实际应用表明,以玻璃织物为载体的薄膜胶粘剂可以粘合热膨胀系数严重不匹配的粘合剂。然而,嵌入玻璃织物对组装膜整体性能的影响还没有系统的研究。为了解决这一知识上的差距,进行了一项研究,比较导电膜粘合剂的性能与没有玻璃织物载体。研究的重点是薄膜粘合剂的机械性能,包括搭接剪切强度、拉伸模量以及处理热膨胀系数不匹配的应用的能力。此外,该研究还评估了载体对薄膜粘合剂的导电性和导热性的影响。总的来说,这一综合评估提供了对玻璃织物载体对薄膜粘合剂性能的有效性的见解。
{"title":"An Evaluation on the Mechanical and Conductive Performance of Electrically Conductive Film Adhesives with Glass Fabric Carriers","authors":"Weiyu Zhang, Yuan Zhao, Zhongwei Liu, Stone Cheng","doi":"10.4071/001c.88424","DOIUrl":"https://doi.org/10.4071/001c.88424","url":null,"abstract":"Conductive assembly film adhesives are extensively employed in medical, telecom, aerospace, and defense systems. Glass fabric cloth is frequently utilized as the carrier in many film adhesives to enhance handling and processability during electronic device assembly. Furthermore, practical applications have shown that film adhesives with glass fabric carriers can bond adherends with severely mismatched coefficients of thermal expansion. However, the impact of embedding glass fabric on the overall performance of assembly films has not been systematically investigated. To address this gap in knowledge, a study was conducted to compare the performance of electrically conductive film adhesives with and without the glass fabric carriers. The study focused on the mechanical performance of the film adhesives, including lap shear strength, tensile modulus, and the ability to manage applications with mismatched coefficients of thermal expansion. Additionally, the study assessed the impact of the carrier on the electrical and thermal conductivity of the film adhesives. Overall, this integrated assessment provides insights into the effectiveness of the glass fabric carrier on the performance of film adhesives.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135812021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation and Evaluation of High-Temperature Encapsulation Materials for Power Module Applications 大功率模块用高温封装材料的研究与评价
Q4 Engineering Pub Date : 2023-07-01 DOI: 10.4071/001c.88421
Benjamin Lyon, Christina DiMarino
With the advent of ultra-wide bandgap semiconductor materials, such as gallium oxide (Ga2O3) and aluminum nitride (AlN), higher temperature and higher voltage operation of power devices are becoming realizable. However, conventional polymeric and organic encapsulant materials are typically limited to operating temperatures of 200 degrees C and below. In this work, six materials were identified and evaluated as candidates for use as encapsulants for operation and high-voltage insulation at and above 250 degrees C. High-temperature silicone gel was used as a reference material and was compared with five novel encapsulants including an epoxy resin, a hydro-set cement, two low-melting point glass compounds, and a ceramic potting compound. Gas pycnometry was utilized to evaluate the voiding concentration to avoid partial discharge. Each material was then processed onto a direct-bonded-aluminum substrate test coupon to evaluate compatibility with a commonly used metal-ceramic substrate and processability for use in a power module. The insulation capability of each material was evaluated by testing the partial discharge inception voltage (PDIV) across a 1-mm gap etched in the substrate. The dielectric stability was then tested by soaking the materials in air at 250 degrees C for various intervals and observing the degradation of their PDIVs and appearances. The results of each test were compared, and conclusions were drawn about each material’s feasibility for use as a dielectric encapsulation material for a power module operating at temperatures exceeding 200 degrees C.
随着氧化镓(Ga2O3)和氮化铝(AlN)等超宽带隙半导体材料的出现,功率器件的高温高压工作成为可能。然而,传统的聚合物和有机封装材料通常限制在200摄氏度及以下的工作温度下。在这项工作中,确定并评估了六种材料作为250℃及以上操作和高压绝缘封装剂的候选材料,高温硅凝胶作为参考材料,并与五种新型封装剂进行了比较,包括环氧树脂,水凝水泥,两种低熔点玻璃化合物和陶瓷灌封化合物。利用气体比重法评估排空浓度,避免部分放电。然后将每种材料加工到直接粘合的铝基板测试片上,以评估与常用金属陶瓷基板的兼容性以及用于功率模块的可加工性。通过在衬底上蚀刻的1毫米间隙上测试局部放电起始电压(PDIV)来评估每种材料的绝缘能力。然后通过在250℃的空气中浸泡不同时间间隔来测试材料的介电稳定性,并观察其pdiv的降解和外观。对每个测试的结果进行了比较,并得出了每种材料作为工作温度超过200℃的电源模块的介电封装材料的可行性的结论。
{"title":"Investigation and Evaluation of High-Temperature Encapsulation Materials for Power Module Applications","authors":"Benjamin Lyon, Christina DiMarino","doi":"10.4071/001c.88421","DOIUrl":"https://doi.org/10.4071/001c.88421","url":null,"abstract":"With the advent of ultra-wide bandgap semiconductor materials, such as gallium oxide (Ga2O3) and aluminum nitride (AlN), higher temperature and higher voltage operation of power devices are becoming realizable. However, conventional polymeric and organic encapsulant materials are typically limited to operating temperatures of 200 degrees C and below. In this work, six materials were identified and evaluated as candidates for use as encapsulants for operation and high-voltage insulation at and above 250 degrees C. High-temperature silicone gel was used as a reference material and was compared with five novel encapsulants including an epoxy resin, a hydro-set cement, two low-melting point glass compounds, and a ceramic potting compound. Gas pycnometry was utilized to evaluate the voiding concentration to avoid partial discharge. Each material was then processed onto a direct-bonded-aluminum substrate test coupon to evaluate compatibility with a commonly used metal-ceramic substrate and processability for use in a power module. The insulation capability of each material was evaluated by testing the partial discharge inception voltage (PDIV) across a 1-mm gap etched in the substrate. The dielectric stability was then tested by soaking the materials in air at 250 degrees C for various intervals and observing the degradation of their PDIVs and appearances. The results of each test were compared, and conclusions were drawn about each material’s feasibility for use as a dielectric encapsulation material for a power module operating at temperatures exceeding 200 degrees C.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135812025","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Hybrid Pressureless Silver Sintering Technology for High-Power Density Electronics 用于高功率密度电子器件的混合无压银烧结技术
Q4 Engineering Pub Date : 2023-07-01 DOI: 10.4071/001c.88422
Yuan Zhao, Bruno Tolla, Doug Katze, Glenda Castaneda, Jo-Anne Wilson, David Brand
Aerospace and defense applications present unique challenges for material suppliers. As increasing adoption of advanced semiconductor materials and Diverse Accessible Heterogeneous Integration technologies, power density of defense and aerospace devices increases rapidly. Traditional die-attaching technology is becoming an increasingly limiting factor in microelectronics packaging for the next generation aerospace and defense systems. Metal particle sintering creates a porous metal foam, which can significantly enhance heat transfer within the sintered material. However, the traditional silver sintering requires very high sintering temperatures that cannot be tolerated by typical microelectronics devices. In addition, the sintered metal foam contains open-cell pores that can absorb/entrap moisture and dusts, which poses a reliability risk. This article introduces an advanced hybrid silver sintering material, which incorporates highperformance silver sintering with high reliability and process-friendly of epoxy-based die-attaching technology. This hybrid sintering paste can be processed without applying any pressures in temperature ranges that are normal in microelectronics packaging processes. Preliminary experimental studies, including Scanning Electron Microscopic study, volume resistivity tests, die shear strength tests, and thermal resistance tests, were performed for developing a low temperature sintering schedule that is compatible with normal assembly processes of high-power density electronics devices. The results indicated that the hybrid material could achieve silver sintering at 150 degrees C and offer 36 enhancement on thermal performance comparing with a widely used die-attach material.
航空航天和国防应用对材料供应商提出了独特的挑战。随着先进半导体材料和多种可及异构集成技术的日益普及,国防和航空航天器件的功率密度迅速提高。传统的贴模技术正日益成为下一代航空航天和国防系统微电子封装的限制因素。金属颗粒烧结产生多孔金属泡沫,可以显著增强烧结材料内的传热。然而,传统的银烧结需要非常高的烧结温度,这是典型的微电子器件所不能忍受的。此外,烧结金属泡沫含有开放孔,可以吸收/夹带水分和灰尘,这对可靠性构成了风险。本文介绍了一种先进的杂化银烧结材料,它结合了高性能银烧结、高可靠性和工艺友好的环氧基压模技术。这种混合烧结膏体可以在微电子封装过程中正常的温度范围内不施加任何压力进行加工。初步实验研究包括扫描电镜研究、体积电阻率测试、模具剪切强度测试和热阻测试,以制定与高功率密度电子器件正常组装工艺兼容的低温烧结计划。结果表明,该杂化材料可以在150℃下实现银的烧结,与广泛使用的模贴材料相比,其热性能提高了36倍。
{"title":"A Hybrid Pressureless Silver Sintering Technology for High-Power Density Electronics","authors":"Yuan Zhao, Bruno Tolla, Doug Katze, Glenda Castaneda, Jo-Anne Wilson, David Brand","doi":"10.4071/001c.88422","DOIUrl":"https://doi.org/10.4071/001c.88422","url":null,"abstract":"Aerospace and defense applications present unique challenges for material suppliers. As increasing adoption of advanced semiconductor materials and Diverse Accessible Heterogeneous Integration technologies, power density of defense and aerospace devices increases rapidly. Traditional die-attaching technology is becoming an increasingly limiting factor in microelectronics packaging for the next generation aerospace and defense systems. Metal particle sintering creates a porous metal foam, which can significantly enhance heat transfer within the sintered material. However, the traditional silver sintering requires very high sintering temperatures that cannot be tolerated by typical microelectronics devices. In addition, the sintered metal foam contains open-cell pores that can absorb/entrap moisture and dusts, which poses a reliability risk. This article introduces an advanced hybrid silver sintering material, which incorporates highperformance silver sintering with high reliability and process-friendly of epoxy-based die-attaching technology. This hybrid sintering paste can be processed without applying any pressures in temperature ranges that are normal in microelectronics packaging processes. Preliminary experimental studies, including Scanning Electron Microscopic study, volume resistivity tests, die shear strength tests, and thermal resistance tests, were performed for developing a low temperature sintering schedule that is compatible with normal assembly processes of high-power density electronics devices. The results indicated that the hybrid material could achieve silver sintering at 150 degrees C and offer 36 enhancement on thermal performance comparing with a widely used die-attach material.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135812024","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Double-Sided Integrated GaN Power Module with Double Pulse Test (DPT) Verification 双脉冲测试(DPT)验证的双面集成GaN电源模块
Q4 Engineering Pub Date : 2023-04-01 DOI: 10.4071/001c.81980
Sourish S. Sinha, Tzu-Hsuan Cheng, Douglas C. Hopkins
Wide Bandgap devices (WBG) have led to an era of high-speed and high-voltage operations that were not previously achievable with silicon devices. However, packaging these devices in the power module has been a challenge due to higher switching rates, which can cause several amperes of displacement current to flow through the parasitic capacitance of the package, thus impacting the gate driver operation and the switching ability of the device. The severity of this current increases in thin packaging substrates, unlike the traditional inorganic substrates, e.g., Direct Bond Copper (DBC) and thus, a thorough investigation is needed before it can be used with WBG semiconductors. The objective of this article is to discuss ways to reduce as well as manipulate the parasitic capacitance at different locations in the power modules to reduce the magnitude of the peak and Root Mean Square (RMS ) value of the displacement current and have a better gate drive signal and power waveform. To study this, a Double Pulse Test (DPT) simulation study has been conducted to show how an intelligent distribution of parasitic capacitance benefits the device functioning. This has been validated through experimental fabrication and DPT of dense power module following proposed guidelines. A detailed description of the design of a high-speed capable DPT circuit and measurement setup has been specified to show the steps needed for reliable testing and measurement.
宽带隙器件(WBG)引领了一个高速和高压操作的时代,这是以前用硅器件无法实现的。然而,由于更高的开关速率,将这些器件封装在功率模块中一直是一个挑战,这可能导致几安培的位移电流流过封装的寄生电容,从而影响栅极驱动器的操作和器件的开关能力。与传统的无机衬底(如直接键合铜(DBC))不同,薄封装衬底中这种电流的严重性增加,因此,在将其用于WBG半导体之前,需要进行彻底的研究。本文的目的是讨论如何减小和控制功率模块中不同位置的寄生电容,以减小位移电流的峰值和均方根(RMS)值的幅度,从而获得更好的栅极驱动信号和功率波形。为了研究这一点,进行了双脉冲测试(DPT)模拟研究,以显示寄生电容的智能分布如何有利于器件功能。这已经通过实验制造和DPT的密集功率模块提出的指导方针进行了验证。详细描述了高速DPT电路和测量装置的设计,以显示可靠测试和测量所需的步骤。
{"title":"Double-Sided Integrated GaN Power Module with Double Pulse Test (DPT) Verification","authors":"Sourish S. Sinha, Tzu-Hsuan Cheng, Douglas C. Hopkins","doi":"10.4071/001c.81980","DOIUrl":"https://doi.org/10.4071/001c.81980","url":null,"abstract":"Wide Bandgap devices (WBG) have led to an era of high-speed and high-voltage operations that were not previously achievable with silicon devices. However, packaging these devices in the power module has been a challenge due to higher switching rates, which can cause several amperes of displacement current to flow through the parasitic capacitance of the package, thus impacting the gate driver operation and the switching ability of the device. The severity of this current increases in thin packaging substrates, unlike the traditional inorganic substrates, e.g., Direct Bond Copper (DBC) and thus, a thorough investigation is needed before it can be used with WBG semiconductors. The objective of this article is to discuss ways to reduce as well as manipulate the parasitic capacitance at different locations in the power modules to reduce the magnitude of the peak and Root Mean Square (RMS ) value of the displacement current and have a better gate drive signal and power waveform. To study this, a Double Pulse Test (DPT) simulation study has been conducted to show how an intelligent distribution of parasitic capacitance benefits the device functioning. This has been validated through experimental fabrication and DPT of dense power module following proposed guidelines. A detailed description of the design of a high-speed capable DPT circuit and measurement setup has been specified to show the steps needed for reliable testing and measurement.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135672139","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation into Impact of Redistribution Layer Design on Thermomechanical Stress in Embedded-Die Package 重分布层设计对嵌入式模封装热机械应力影响的研究
Q4 Engineering Pub Date : 2023-04-01 DOI: 10.4071/001c.81979
M. Matsuura, T. Asano, H. Kanaya
Thermomechanical stress generation on a silicon chip in an embedded-die package (EDP) was investigated. Change in thermomechanical stress on the chip with temperature was evaluated using piezo-resistance gauges fabricated on the chip. To investigate the impact of a redistribution layer (RDL) on stress generation, an EDP where filling materials facing the top and bottom sides and the periphery of the embedded die were entirely removed was fabricated. The removal of filling materials was carried out by using the CO2 laser ablation technology. RDL having diagonal paths from the substrate to the chip was designed and fabricated in addition to the conventional orthogonal RDL. RDLs were made of copper. Temperature tests were carried out in the range from 260 degrees C to 100 degrees C. The experimental results indicate that, while the origin of thermomechanical stress is a mismatch in coefficients of thermal expansion (CTE) between the chip and the organic substrate, RDL plays a significant role in generating the thermomechanical stress on the chip. The results also show that the diagonal RDL design effectively reduces thermomechanical stress from the orthogonal RDL design owing to its spring characteristic.
研究了嵌入式芯片封装(EDP)中硅芯片的热机械应力产生。利用在芯片上制作的压阻计,评估了芯片上的热机械应力随温度的变化。为了研究再分布层(RDL)对应力产生的影响,制作了一个EDP,其中面向顶部和底部的填充材料以及嵌入式模具的外围完全被移除。采用CO2激光烧蚀技术对填充材料进行了去除。除了传统的正交RDL外,还设计和制造了从衬底到芯片具有对角路径的RDL。rdl是由铜制成的。温度测试在260℃~ 100℃范围内进行,实验结果表明,热机械应力的来源是芯片与有机衬底之间热膨胀系数(CTE)的不匹配,而RDL在芯片上的热机械应力产生中起着重要作用。结果还表明,对角RDL设计由于其弹簧特性,可以有效地降低正交RDL设计的热机械应力。
{"title":"Investigation into Impact of Redistribution Layer Design on Thermomechanical Stress in Embedded-Die Package","authors":"M. Matsuura, T. Asano, H. Kanaya","doi":"10.4071/001c.81979","DOIUrl":"https://doi.org/10.4071/001c.81979","url":null,"abstract":"Thermomechanical stress generation on a silicon chip in an embedded-die package (EDP) was investigated. Change in thermomechanical stress on the chip with temperature was evaluated using piezo-resistance gauges fabricated on the chip. To investigate the impact of a redistribution layer (RDL) on stress generation, an EDP where filling materials facing the top and bottom sides and the periphery of the embedded die were entirely removed was fabricated. The removal of filling materials was carried out by using the CO2 laser ablation technology. RDL having diagonal paths from the substrate to the chip was designed and fabricated in addition to the conventional orthogonal RDL. RDLs were made of copper. Temperature tests were carried out in the range from 260 degrees C to 100 degrees C. The experimental results indicate that, while the origin of thermomechanical stress is a mismatch in coefficients of thermal expansion (CTE) between the chip and the organic substrate, RDL plays a significant role in generating the thermomechanical stress on the chip. The results also show that the diagonal RDL design effectively reduces thermomechanical stress from the orthogonal RDL design owing to its spring characteristic.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":"1 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42576795","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
State-of-the-Art in Chiplets Horizontal Communications 小芯片水平通信的最新技术
Q4 Engineering Pub Date : 2023-04-01 DOI: 10.4071/001c.81977
J. Lau
In this study, the recent advances and trends in chiplet lateral communications (bridges) will be investigated. Emphasis is placed on the definition, kinds, advantages and disadvantages, challenges (opportunities), and examples of chiplet horizontal communications. Some recommendations will also be provided.
在这项研究中,将调查小芯片横向通信(桥梁)的最新进展和趋势。重点介绍了小芯片横向通信的定义、种类、优缺点、挑战(机遇)和实例。还将提供一些建议。
{"title":"State-of-the-Art in Chiplets Horizontal Communications","authors":"J. Lau","doi":"10.4071/001c.81977","DOIUrl":"https://doi.org/10.4071/001c.81977","url":null,"abstract":"In this study, the recent advances and trends in chiplet lateral communications (bridges) will be investigated. Emphasis is placed on the definition, kinds, advantages and disadvantages, challenges (opportunities), and examples of chiplet horizontal communications. Some recommendations will also be provided.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":" ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47833537","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Journal of Microelectronics and Electronic Packaging
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