Mathematical analysis of intensity distribution of the optical image in various degrees of coherence of illumination (representation of intensity by Hermitian matrices)

IF 1.5 2区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Micro/Nanolithography, MEMS, and MOEMS Pub Date : 2019-06-18 DOI:10.1117/1.JMM.18.2.021101
H. Gamo
{"title":"Mathematical analysis of intensity distribution of the optical image in various degrees of coherence of illumination (representation of intensity by Hermitian matrices)","authors":"H. Gamo","doi":"10.1117/1.JMM.18.2.021101","DOIUrl":null,"url":null,"abstract":"Abstract. This is a historical translation of the seminal paper by H. Gamo, originally published in Oyo Buturi (Applied Physics, a journal of The Japan Society of Applied Physics) Vol. 25, pp. 431–443, 1956. English translation by Kenji Yamazoe, with further editing by the translator and Anthony Yen. Since optical systems have distinctive features as compared to electrical communication systems, some formulation should be prepared for the optical image in order to use it in information theory of optical systems. In this paper the following formula for the intensity distribution of the image by an optical system having a given aperture constant α in the absence of both aberration and defect in focusing is obtained by considering the nature of illumination, namely coherent, partially coherent, and incoherent: I(y)=∑n∑manmun(y)um*(y),where un(y)  =  sin 2πα/λ (y  −  nλ/2α) / 2πα/λ (y  −  nλ/2α) and anm  =  (2α/λ)2  ∬  Γ12(x1  −  x2) E(x1) E* (x2)  |  A(x1)  ||  A* (x2)  |  un(x1)um(x2)dx1 dx2. I(y) is the intensity of the image at a point of coordinate y, Γ12 the phase coherence factor introduced by H. H. Hopkins et al., E  (  x  )   the complex transmission coefficient of the object and A  (  x  )   the complex amplitude of the incident waves at the object, and the integration is taken over the object plane. The above expression has some interesting features, namely the “intensity matrix” composed of the element anm mentioned above is a positive-definite Hermitian matrix, and the diagonal elements are given by the intensities sampled at every point of the image plane separated by a distance λ  /  2α, and the trace of the matrix or the sum of diagonal elements is equal to the total intensity integrated over the image plane. Since a Hermitian matrix can be reduced to diagonal form by a unitary transformation, the intensity distribution of the image can be expressed as I(y)=λ1|∑Si1ui|2+λ2|∑Si2ui|2+⋯+λn|∑Sinui|2+⋯,where λ1  ,  λ2  ,    …    ,  λn  ,    …   are non-negative eigenvalues of the intensity matrix. In case of coherent illumination, only the first term of the above equation remains and all the other terms are zero, because the rank of the coherent intensity matrix is one, and its only non-vanishing eigenvalue is equal to the total intensity of the image. On the other hand, the rank of the incoherent intensity matrix is larger than the rank of any other coherent or partially coherent cases. The term of the largest eigenvalue in the above formulation may be especially important, because it will correspond to the coherent part of the image in case of partially coherent illumination. From the intensity matrix of the image obtained by uniform illumination of the object having uniform transmission coefficient, we may derive an interesting quantity, namely d=−∑n(λn/I0)log(λn/I0),where λn is the n-th eigenvalue of the intensity matrix and I0 is the trace of the matrix. d is zero for the coherent illumination and becomes log N for the incoherent illumination, where N is the “degree of freedom” of the image of the area S, namely N  =  4α2S  /  λ2. The value of d for partially coherent illumination is a positive quantity smaller than log N. A quantity δ  =    (  d0  −  d  )    /  d0 may be regarded as a measure of the “degree of coherence” of the illumination, where d0  =  log N and δ is unity for the coherent case and zero for the perfectly incoherent case. The sampling theorem for the intensity distribution is derived, and the relation between elements of intensity matrix and intensities sampled at every point separated by the distance λ  /  4α is shown.","PeriodicalId":16522,"journal":{"name":"Journal of Micro/Nanolithography, MEMS, and MOEMS","volume":"60 4","pages":"021101 - 021101"},"PeriodicalIF":1.5000,"publicationDate":"2019-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Micro/Nanolithography, MEMS, and MOEMS","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1117/1.JMM.18.2.021101","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 1

Abstract

Abstract. This is a historical translation of the seminal paper by H. Gamo, originally published in Oyo Buturi (Applied Physics, a journal of The Japan Society of Applied Physics) Vol. 25, pp. 431–443, 1956. English translation by Kenji Yamazoe, with further editing by the translator and Anthony Yen. Since optical systems have distinctive features as compared to electrical communication systems, some formulation should be prepared for the optical image in order to use it in information theory of optical systems. In this paper the following formula for the intensity distribution of the image by an optical system having a given aperture constant α in the absence of both aberration and defect in focusing is obtained by considering the nature of illumination, namely coherent, partially coherent, and incoherent: I(y)=∑n∑manmun(y)um*(y),where un(y)  =  sin 2πα/λ (y  −  nλ/2α) / 2πα/λ (y  −  nλ/2α) and anm  =  (2α/λ)2  ∬  Γ12(x1  −  x2) E(x1) E* (x2)  |  A(x1)  ||  A* (x2)  |  un(x1)um(x2)dx1 dx2. I(y) is the intensity of the image at a point of coordinate y, Γ12 the phase coherence factor introduced by H. H. Hopkins et al., E  (  x  )   the complex transmission coefficient of the object and A  (  x  )   the complex amplitude of the incident waves at the object, and the integration is taken over the object plane. The above expression has some interesting features, namely the “intensity matrix” composed of the element anm mentioned above is a positive-definite Hermitian matrix, and the diagonal elements are given by the intensities sampled at every point of the image plane separated by a distance λ  /  2α, and the trace of the matrix or the sum of diagonal elements is equal to the total intensity integrated over the image plane. Since a Hermitian matrix can be reduced to diagonal form by a unitary transformation, the intensity distribution of the image can be expressed as I(y)=λ1|∑Si1ui|2+λ2|∑Si2ui|2+⋯+λn|∑Sinui|2+⋯,where λ1  ,  λ2  ,    …    ,  λn  ,    …   are non-negative eigenvalues of the intensity matrix. In case of coherent illumination, only the first term of the above equation remains and all the other terms are zero, because the rank of the coherent intensity matrix is one, and its only non-vanishing eigenvalue is equal to the total intensity of the image. On the other hand, the rank of the incoherent intensity matrix is larger than the rank of any other coherent or partially coherent cases. The term of the largest eigenvalue in the above formulation may be especially important, because it will correspond to the coherent part of the image in case of partially coherent illumination. From the intensity matrix of the image obtained by uniform illumination of the object having uniform transmission coefficient, we may derive an interesting quantity, namely d=−∑n(λn/I0)log(λn/I0),where λn is the n-th eigenvalue of the intensity matrix and I0 is the trace of the matrix. d is zero for the coherent illumination and becomes log N for the incoherent illumination, where N is the “degree of freedom” of the image of the area S, namely N  =  4α2S  /  λ2. The value of d for partially coherent illumination is a positive quantity smaller than log N. A quantity δ  =    (  d0  −  d  )    /  d0 may be regarded as a measure of the “degree of coherence” of the illumination, where d0  =  log N and δ is unity for the coherent case and zero for the perfectly incoherent case. The sampling theorem for the intensity distribution is derived, and the relation between elements of intensity matrix and intensities sampled at every point separated by the distance λ  /  4α is shown.
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不同照明相干度下光学图像强度分布的数学分析(强度用厄米矩阵表示)
摘要这是H. Gamo的开创性论文的历史翻译,最初发表在Oyo Buturi(应用物理学,日本应用物理学会期刊)第25卷,第431-443页,1956年。山前健二(Kenji yamamazoe)翻译,译者和甄子丹(Anthony Yen)进一步编辑。由于光学系统与电气通信系统相比具有明显的特点,因此为了将光学图像应用于光学系统信息论,必须对光学图像进行一定的表述。本文以下图像的强度分布公式的孔径光学系统在一个给定的常数α没有偏差和缺陷主要是通过考虑照明的本质,即相干,部分相干和非相干:我(y) =∑n∑manmun (y) * (y),在联合国(y) =罪2πα/λ(y−nλ/ 2α)/ 2πα/λ(y−nλ/ 2α)和anm =(2α/λ)2∬Γ12 (x1−x2) E (x1) E * (x2) | (x1) | | * (x2) |联合国(x1)嗯dx1 dx2 (x2)。I(y)为坐标y点处图像的强度,Γ12为h.h. Hopkins等人引入的相位相干系数,E (x)为物体的复透射系数,a (x)为入射波在物体处的复振幅,积分在物体平面上进行。上面的表达式有一些有趣的特点,即由上述元素anm组成的“强度矩阵”是一个正定的厄米矩阵,对角元素由在像平面上每一点采样的强度给出,距离为λ / 2α,矩阵的迹线或对角元素的和等于在像平面上积分的总强度。由于赫米矩阵可以通过幺正变换简化为对角形式,因此图像的强度分布可以表示为I(y)=λ1|∑Si1ui|2+λ2|∑Si2ui|2+⋯+λn|∑Sinui|2+⋯,其中λ1、λ2、…、λn、…是强度矩阵的非负特征值。在相干照明情况下,由于相干强度矩阵的秩为1,且其唯一不消失的特征值等于图像的总强度,因此,上式仅保留第一项,其余项均为零。另一方面,非相干强度矩阵的秩大于任何其他相干或部分相干情况的秩。上述公式中的最大特征值项可能特别重要,因为在部分相干照明的情况下,它将对应于图像的相干部分。从均匀照射具有均匀透射系数的物体得到的图像强度矩阵,我们可以得到一个有趣的量,即d=−∑n(λn/I0)log(λn/I0),其中λn是强度矩阵的第n个特征值,I0是矩阵的迹线。d在相干光照下为零,在非相干光照下为log N,其中N为S区域图像的“自由度”,即N = 4α2S / λ2。部分相干照明的d值是一个小于log N的正数。量δ = (d0−d) / d0可以看作是照明“相干度”的度量,其中d0 = log N, δ在相干情况下为单位,在完全不相干情况下为零。导出了强度分布的采样定理,给出了强度矩阵的元素与以距离λ / 4α为间隔的每一点采样的强度之间的关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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CiteScore
3.40
自引率
30.40%
发文量
0
审稿时长
6-12 weeks
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