{"title":"Low-cost fabrication of an on-chip Fabry-Perot interferometer for dry environmental monitoring","authors":"Régis Guertin, M. Bianki, Y. Peter","doi":"10.1109/OMN/SBFotonIOPC58971.2023.10230951","DOIUrl":null,"url":null,"abstract":"A silicon (110) on-chip in-plane Fabry-Perot in-terferometer (FPI) with fiber grooves and polymer reservoirs is fabricated through a single anisotropic wet etching process, resulting in high verticality and low roughness. The FPI exhibits high finesse and Q factors and is functionalized with polymers to enable temperature and gas sensing.","PeriodicalId":31141,"journal":{"name":"Netcom","volume":"32 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2023-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Netcom","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230951","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A silicon (110) on-chip in-plane Fabry-Perot in-terferometer (FPI) with fiber grooves and polymer reservoirs is fabricated through a single anisotropic wet etching process, resulting in high verticality and low roughness. The FPI exhibits high finesse and Q factors and is functionalized with polymers to enable temperature and gas sensing.
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