Simple, low degree-of-freedom load-lock and in-vacuum sample transfer

Abstract

A mechanism is described for the loading and unloading of samples from an instrument housing in a way that achieves strong mechanical contact between the sample and housing. A single linear–rotary magnetically coupled feedthrough is required to effect transfer. An additional load-lock mechanism requires only a single linear magnetic feedthrough, which remains in the UHV part of the chamber. The load-lock itself has no motion feedthroughs, which simplifies design and maximizes the pump-down speed. 3D-printing technology allows for intricately detailed parts to be used in both the sample transfer and load-lock mechanisms.