E. Geerlings, M. Rattunde, J. Schmitz, G. Kaufel, J. Wagner, D. Kallweit, H. Zappe
{"title":"Micro-mechanical external-cavity laser with wide tuning range","authors":"E. Geerlings, M. Rattunde, J. Schmitz, G. Kaufel, J. Wagner, D. Kallweit, H. Zappe","doi":"10.1109/MEMSYS.2007.4433090","DOIUrl":null,"url":null,"abstract":"We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrow configuration. An electrostatically-actuated silicon- grating, optimized to achieve a wide tuning range in the 2.3 mum wavelength range, is used as tuning element. A tuning range of 82 nm could be realized. The maximum output power of the micro external cavity laser (muECL) was above 15 mW over the entire tuning range.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"731-734"},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433090","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrow configuration. An electrostatically-actuated silicon- grating, optimized to achieve a wide tuning range in the 2.3 mum wavelength range, is used as tuning element. A tuning range of 82 nm could be realized. The maximum output power of the micro external cavity laser (muECL) was above 15 mW over the entire tuning range.