{"title":"Применение просвечивающей электронной микроскопии для исследования функционального наноэлемента","authors":"К. Е. Приходько, М. М. Дементьева","doi":"10.21883/jtf.2023.07.55769.67-23","DOIUrl":null,"url":null,"abstract":"Using the focused ion beam probe method, cross-section sample of a single functional device of micron dimensions were cut out for STEM and TEM studies. The use of analytical methods of transmission electron microscopy made it possible to obtain accurate data on the geometric parameters of nanoscale functional devices, the phase and elemental composition of functional element material, as well as on the concentration of free electrons at the Fermi level in the nanoelement material.","PeriodicalId":24036,"journal":{"name":"Журнал технической физики","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Журнал технической физики","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.21883/jtf.2023.07.55769.67-23","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Using the focused ion beam probe method, cross-section sample of a single functional device of micron dimensions were cut out for STEM and TEM studies. The use of analytical methods of transmission electron microscopy made it possible to obtain accurate data on the geometric parameters of nanoscale functional devices, the phase and elemental composition of functional element material, as well as on the concentration of free electrons at the Fermi level in the nanoelement material.
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