Дисперсионные элементы зеркального спектрометра на диапазон 7-30 nm

Abstract

Multilayer interference structures acting as dispersion elements for a mirror spectrometer for a wavelength range of 7-30 nm have been calculated and synthesized. Three elements are implemented: for the range λ=7-12 nm – multilayer structure Mo/B4C (periods N=60; period thickness d=6.50 nm); for the range λ=11-18 nm – Mo/Be (N=50; d=9.83 nm) and for the range λ=17-30 nm – Be/Si/Al (N=40; d=18.2 nm). For the entire spectral range, an efficiency of more than 10% was obtained at a wavelength resolution of 0.15-1.0 nm.