Характеристики емкостного высокочастотного разряда в магнитном поле с преимущественной радиальной составляющей

Abstract

The work presents the results of an experimental study of the characteristics of the RF capacitive discharge placed in a magnetic field with a predominant radial component. The experiments are performed in the plasma source, which has the geometry of a Hall thruster. The integrated characteristics of the discharge, as well as the axial distribution of the probe ion current in the channel of the plasma source, are measured using three diagrams of the organization of the external discharge circuit: with the open for DC discharge circuit, as well as in the combination of a capacitive discharge with a direct current discharge. The main measurements are made in the argon in the flowrate range of 0.75 - 1.8 mg/s and the power of the generator 80 - 300 W at a frequencies of 2, 4 and 13.56 MHz, the induction of the magnetic field lying in the range of 100 - 300 G. Evaluation of the parameters of the plasma engine based on capacitive RF discharge when working in air, argon and krypton are made.