Design, fabrication and testing of piezo-electric driving mechanism for micro-optics

Abstract

This paper reports the design, fabrication and characterization of an inter-digitated piezoelectric actuation mechanism for micro-lens movement. A theoretical model has been developed and substantiated by ANSYS simulation. Results show good agreement with both simulation and modeling. The out-of-plane deflection is 24μm at 6V/μm electric field with a maximum Deflection Sensitivity to Voltage (DSV) of 0.5μm/V. The unloaded resonance frequency is 2420Hz. With a 600μm diameter ball lens weighing 320μg mounted to the actuation structure, the resonance frequency is reduced to 752Hz without significantly impacting the static out-of-plane deflection behavior. In comparison to other micro-lens actuator, this structure demonstrates large deflection response and a relatively large resonance frequency.