Characterization of PZT multi-layer actuator

Abstract

Many actuator applications require high resolution, accuracy and fast response time. Piezoelectric multi-layer actuators are used for such applications to manage displacements from nanometer to micrometer range and the response time in microseconds at comparatively low drive voltages. This paper deals with the characterization of lead zirconate titanate (PZT) ceramic multilayer actuators fabricated by tape casting method utilizing impedance analysis and strain measurements. Width mode resonance frequency is predicted using finite element analysis. The electrical impedance spectrums in the frequency range 100 kHz to 250 kHz of PZT multilayers show a small change in resonant behavior. Possible reasons for this change are discussed. Presence of defect in the multi-layer actuator is validated by optical microscopy. The results also show the displacement response at 75V of defect free PZT multilayer actuator.