J. Lau, C. Ko, C. Peng, Kai-Ming Yang, Tim Xia, P. Lin, Jean-Jou Chen, Po-Chun Huang, Tzvy-Jang Tseng, E. Lin, Leo Chang, Curry Lin, Winnie Lu
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引用次数: 2
Abstract
In this investigation, the chip-last, RDL (redistribution-layer)-first, fan-out panel-level packaging (FOPLP) for heterogeneous integration is studied. Emphasis is placed on the materials, process, fabrication, and reliability of a heterogeneous integration of one large chip (10mm × 10mm) and two small chips (7mm × 5mm) by a FOPLP method on a 20mm × 20mm RDL-first substrate fabricated on a 515mm × 510mm temporary glass panel. Reliability test such as the drop test of the heterogeneous integration package on a PCB (printed circuit board) is performed and test results including failure analysis are presented. Some recommendations are also provided.
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