S. Owa, M. Doi, H. Kawai, H. Kitano, S. Miwa, H. Matsuura, A. Tokuhisa
{"title":"A 193 nm light source using fiber amplifier and nonlinear wavelength conversion","authors":"S. Owa, M. Doi, H. Kawai, H. Kitano, S. Miwa, H. Matsuura, A. Tokuhisa","doi":"10.1109/LEOS.2001.969170","DOIUrl":null,"url":null,"abstract":"One approach to compact UV light sources is an all-solid-state 193 nm laser system, which utilizes an Er-doped fiber amplifier (EDFA) of 1547 nm wavelength as part of the fundamental light source, and five-stage frequency conversion optics for generating the eighth harmonic of 193 nm light. We propose the use of Gd/sub x/Y/sub 1-x/Ca/sub 4/O(BO/sub 3/)/sub 3/ as the fourth-harmonic crystal to improve the wavelength conversion optics, and report the results of durability tests up to 500 hours.","PeriodicalId":18008,"journal":{"name":"LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)","volume":"18 1","pages":"56-57 vol.1"},"PeriodicalIF":0.0000,"publicationDate":"2001-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LEOS.2001.969170","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
One approach to compact UV light sources is an all-solid-state 193 nm laser system, which utilizes an Er-doped fiber amplifier (EDFA) of 1547 nm wavelength as part of the fundamental light source, and five-stage frequency conversion optics for generating the eighth harmonic of 193 nm light. We propose the use of Gd/sub x/Y/sub 1-x/Ca/sub 4/O(BO/sub 3/)/sub 3/ as the fourth-harmonic crystal to improve the wavelength conversion optics, and report the results of durability tests up to 500 hours.
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