AMHS Capability Assessment Based on Planned Product Mixes

Robert Schmaler, C. Hammel, C. Schubert
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引用次数: 2

Abstract

Automated material handling systems (AMHS) in Semiconductor Fabrication Plants (Fabs) are crucial to achieve a high production throughput. When refurbishing an existing or planning a new Fab production plans are used to decide on the necessary tool park. But what about AMHS planning? To our knowledge no method exists, given an anticipated product mix, to reliably generate expected transport patterns including nonproductive transports. This paper summarizes a methodology based on a given product mix together with scheduling rules and AMHS characteristics to generate such transport patterns, including non-productive transports like test wafers and empty FOUPs, and subsequently a deep insight into actual AMHS capabilities and requirements in the planning phase. Results will be reviewed via static simulation to identify possible AMHS bottlenecks as early as possible.
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基于计划产品组合的AMHS能力评估
半导体制造工厂(fab)中的自动化物料处理系统(AMHS)对于实现高生产吞吐量至关重要。在翻新现有工厂或计划新建工厂时,需要使用生产计划来确定必要的工具库。但是AMHS的规划呢?据我们所知,在给定预期产品组合的情况下,没有方法可以可靠地生成包括非生产性运输在内的预期运输模式。本文总结了一种基于给定产品组合的方法,结合调度规则和AMHS特性来生成这种运输模式,包括非生产性运输,如测试晶圆和空foup,以及随后在计划阶段对实际AMHS功能和需求的深入了解。结果将通过静态模拟进行审查,以尽早确定可能的AMHS瓶颈。
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