{"title":"Anti-wetting trench of nozzle plate for piezoelectric actuating dispenser","authors":"Chunping Lu, Wen-Chieh Liu, Chun-Jung Chen, C. Fu","doi":"10.1109/IMPACT.2009.5382277","DOIUrl":null,"url":null,"abstract":"We have developed a high flow rate stable liquid dispensing system by using a low energy consumption actuator. It is made of a piezoelectric (PZT) actuating porous membrane with the resonant frequency of the system, featuring relatively small movement parts with a robust structure. Taking advantage of the high latent heat during phase changes from water droplet to vapor, we were able to remove heat from a hot body surface of over 100W with the dispensing system as cooling application.","PeriodicalId":6410,"journal":{"name":"2009 4th International Microsystems, Packaging, Assembly and Circuits Technology Conference","volume":"34 1","pages":"674-677"},"PeriodicalIF":0.0000,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 4th International Microsystems, Packaging, Assembly and Circuits Technology Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMPACT.2009.5382277","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12
Abstract
We have developed a high flow rate stable liquid dispensing system by using a low energy consumption actuator. It is made of a piezoelectric (PZT) actuating porous membrane with the resonant frequency of the system, featuring relatively small movement parts with a robust structure. Taking advantage of the high latent heat during phase changes from water droplet to vapor, we were able to remove heat from a hot body surface of over 100W with the dispensing system as cooling application.
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