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2009 4th International Microsystems, Packaging, Assembly and Circuits Technology Conference最新文献

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Estimation design of MEMS-based inertial navigation systems with noise coupling input saturation: Robust approach 具有噪声耦合输入饱和的mems惯性导航系统估计设计:鲁棒方法
Yung-Yue Chen, Shyang-Jye Chang, Yung-Hsiang Chen
There are, in practice, so many control systems possesses this kind of special feature, e.g., ballistic missile's maneuver couples with wind gusts, acceleration signal measured by accelerometers couples with the external and internal noises, and so on. Generally, the input signal u(k) is always assumed as an exactly known variable and never corrupted with noise; hence one is capable of dealing with these kinds of estimation problems by the well-known Kalman Filter that is widely used in the state estimation. Of course, it is no doubt that in the presence of unknown noise coupling input saturations, performance of Kalman Filter will be seriously degraded since the unknown input saturations coupling with input noises appear on a system model as extensive noises, and the constant processing noise variance will be not capable of covering it because of the time-variant character of these type signals.
在实际应用中,许多控制系统都具有这种特性,如弹道导弹机动与阵风耦合、加速度计测量的加速度信号与内外噪声耦合等。通常,输入信号u(k)总是被假设为一个完全已知的变量,并且不会被噪声破坏;因此,在状态估计中广泛应用的卡尔曼滤波能够处理这类估计问题。当然,毫无疑问,在存在未知噪声耦合输入饱和的情况下,卡尔曼滤波器的性能会严重下降,因为与输入噪声耦合的未知输入饱和在系统模型上表现为广泛的噪声,并且由于这类信号的时变特性,恒定的处理噪声方差将无法覆盖它。
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引用次数: 0
Experimental investigation and finite element analysis of bump wafer probing 凹凸圆片探测的实验研究与有限元分析
H. Chang, W. Pan, M. Shih, Y. Lai
The purpose of this paper is to analyze the bump height variation and probe mark profile with various bump materials for wafer probing. It is necessary to establish different material bump wafer probing criteria, because the bump height variation and probe mark area have severe influence on the sort flip chip wafers that will affects the quality of the contact behavior and further impacts the flip chip assembly process reliability after wafer level probing. Standard bump wafer probing parameters can not only satisfy customer's various characters of devices, but is easy to control the appropriate bump height and probe mark quality to ensure assembly process reliability and to avoid the cold joint issue. In this paper, probing bump height and probe mark configuration with different bump materials were performed and the resultant probe marks from experiment were verified against the FE simulation results. A three-dimensional computational model was developed for analyze the contact phenomena of the solder bump and the probe. Finally, the standard bump wafer probing criteria were built by the experimental results and numerical methods. They can be used as the verified simulating model which is a useful performance evaluation tool to support the choice of suitable probe recipes and wafer probe parameters with more different bump dimensions and materials of wafer probing.
本文的目的是分析不同凸点材料在圆片探测中的凸点高度变化和探针标记轮廓。由于凸点高度的变化和凸点标记面积对倒装晶圆的分类影响很大,从而影响到接触行为的质量,进而影响到倒装晶圆级探测后倒装晶圆组装工艺的可靠性,因此有必要建立不同的材料凸点晶圆探测标准。标准的凸点晶圆探测参数既能满足客户对器件的各种特性要求,又便于控制合适的凸点高度和探测标记质量,保证装配过程的可靠性,避免冷接头问题。本文对不同碰撞材料下的探测碰撞高度和探测标记配置进行了研究,并将实验所得的探测标记与有限元仿真结果进行了验证。建立了一个三维计算模型来分析凸点与探针的接触现象。最后,结合实验结果和数值方法,建立了标准的凹凸圆片探测准则。它们可以作为验证的仿真模型,为在更多不同凸点尺寸和晶圆探测材料的情况下选择合适的探针配方和晶圆探测参数提供有用的性能评估工具。
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引用次数: 2
Fundamental study of 95 high-lead solder bump on substrates pre-soldered with eutectic PbSn 共晶PbSn预焊基板上95高铅凸点的基础研究
Chih-Chiang. Chang, Chun-Cheng Lin, C. Kao
This study investigated the intermixing of 95Pb5Sn solder bumps and 37Pb63Sn pre-solder in flip-chip solder joints. The reaction conditions included multiple reflows (up to 10) at 240 °C, whereby previously solder-coated parts are joined by heating without using additional solder. We found that the molten pre-solder had an irregular shape similar to a calyx (i.e., a cuplike structure) wrapped around a high-lead solder bump. The height to which the molten pre-solder ascended along the solid high-lead solder bump increased with the number of reflows. The molten pre-solder was able to reach the UBM/95Pb5Sn interface after three to five reflows. The molten pre-solder at the UBM/95Pb5Sn interface generated two important phenomena: (1) the molten solder dewetted (i.e., flowed away from the soldered surface) along the UBM/95Pb5Sn interface, particularly when the number of reflows was high, and (2) the molten pre-solder transported Cu atoms to the UBM/95Pb5Sn interface, which in turn caused the Ni-Sn compounds at the chip-side interface to change into (Cu0.6Ni0.4)6Sn5.
研究了95Pb5Sn钎料凸点与37Pb63Sn预焊料在倒装焊点中的混合。反应条件包括在240°C下多次回流(最多10次),通过加热将先前涂有焊料的部件连接起来,而不使用额外的焊料。我们发现熔融预焊料有一个不规则的形状,类似于一个花萼(即,一个杯状结构)包裹在一个高铅焊料凸起上。随着回流次数的增加,熔融预焊料沿固体高铅焊料凸点上升的高度增加。熔融预焊料经过3 ~ 5次回流后能够到达UBM/95Pb5Sn界面。UBM/95Pb5Sn界面处的预焊液产生了两个重要现象:(1)预焊液沿UBM/95Pb5Sn界面脱湿(即从被焊表面流出),回流次数多时尤为明显;(2)预焊液将Cu原子输送到UBM/95Pb5Sn界面,从而导致芯片侧界面处的Ni-Sn化合物转变为(Cu0.6Ni0.4)6Sn5。
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引用次数: 0
Thermal simulation and design of GaAs HBTs GaAs HBTs的热模拟与设计
Chung-Yen Hsu, Sheng-Liang Kuo, Chun-Kai Liu, Y. Chao, M. Dai, Y.C. Wang, C.K. Lin, W. K. Wang, S. Li, Jericho Chen
GaAs based hetero-junction bipolar transistors (HBTs) offer high speed and good device matching characteristics that are attractive for many high-speed circuits. However, thermal behaviors with multi-fingers can significantly affect HBTs performance. In this paper, three dimensional (3-D) finite-element modeling (FEM) approaches are built up to analyze the maximum temperature region and temperature distribution of GaAs based HBTs devices. The thermal performance for two different types of unit cell including the standard cell and emitter thermal shunt cell were simulated and compared. As a result of generated heat from emitter fingers transfers to the substrate through the metal bridge, unit cell with emitter thermal shunt reduced the junction temperature significantly. The thermal effects of metal bridge thickness and various substrate thermal conductivity values are also discussed.
基于砷化镓的异质结双极晶体管(hbt)具有高速和良好的器件匹配特性,对许多高速电路具有吸引力。然而,多指热行为会显著影响HBTs的性能。本文建立了三维有限元建模方法,分析了GaAs基高温超导器件的最高温度区域和温度分布。对标准电池和发射极热分流电池两种不同类型的单体电池的热性能进行了模拟和比较。由于发射器手指产生的热量通过金属桥传递到衬底,具有发射器热分流的单元电池显着降低了结温。讨论了金属桥厚度和不同衬底导热系数的热效应。
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引用次数: 0
Breakthroughs in chip embedding technologies leading to the emergence of further miniaturised system-in-packages 芯片嵌入技术的突破导致进一步小型化系统级封装的出现
D. Manessis, L. Boettcher, A. Ostmann, S. Karaszkiewicz, H. Reichl
allows a very high degree of miniaturization by stacking multiple layers of embedded thin components. This paper shows the realisation of embedded chip QFN-packages (Quad Flat No-Lead) with a size of 10mmx10mm which were manufactured at prototype level at 10„x14„ panels. The embedded chip in the package has a pad pitch of 100µm and the resultant QFN package has a total number of 84I/Os at 400µm footprint pitch. State-of-the-art developments in semi-additive processes by employment of laserdirect- imaging technology (LDI) have demonstrated very fine 18µm lines with 10µm space between them for the final package copper routing. The work in this paper provides evidence for chip embedding capability at very fine chip pad pitch of 100µm and discusses the technology limits. The present work at research prototype level frames the main activities in the EU-Hermes project towards the industrialisation of chip embedding technologies.
通过堆叠多层嵌入式薄组件,实现非常高的小型化程度。本文展示了尺寸为10mmx10mm的嵌入式芯片qfn封装(Quad Flat No-Lead)的实现,该封装在10“x14”面板的原型水平上制造。封装中的嵌入式芯片的焊盘间距为100 μ m,由此产生的QFN封装在400 μ m占地间距下具有84I/ o总数。采用激光直接成像技术(LDI)的半增材工艺的最新发展已经展示了非常精细的18微米线,它们之间的空间为10微米,用于最终封装铜布线。本文的工作提供了在极细的芯片衬垫间距为100µm时芯片嵌入能力的证据,并讨论了技术限制。目前在研究原型水平的工作框架的主要活动在欧盟赫尔墨斯项目对芯片嵌入技术的工业化。
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引用次数: 4
Large-scale preparation of ternary BiSbTe films with enhanced thermoelectric properties using DC magnetron sputtering 利用直流磁控溅射大规模制备热电性能增强的三元铋酸铋薄膜
W. Fang, K. Liou, M. Leu
Large-scale synthesis of BiSbTe films with enhanced electrical property and Seebeck coefficient has been demonstrated in this work. As-grown BiSbTe films are found to have lower carrier concentration and higher electron mobility after the post annealing fulfilled. From the resultant high-resolution transmission electron microscope (HRTEM) images, the phenomenon of annealinginduced preferential Sb diffusion is corroborated to elaborate the reason why electrical properties could be improved. Moreover, the precipitation of Sb-rich phase is embedded in the thermally-treated BiSbTe films. Such the feasibility of large-scale fabrication of BiSbTe films with the elevated power factor is evidenced and this is very promising in the realization of room-temperature thermoelectric (TE) applications with high performances.
大规模合成具有增强电学性能和塞贝克系数的铋酸铋薄膜。经退火处理后,原位生长的bbte薄膜具有较低的载流子浓度和较高的电子迁移率。从高分辨率透射电镜(HRTEM)图像中,证实了退火诱导的Sb优先扩散现象,并阐述了电性能可以改善的原因。此外,在热处理后的bbte薄膜中还嵌入了富sb相的析出。这证明了大规模制造具有高功率因数的bbte薄膜的可行性,这在实现高性能室温热电(TE)应用方面是非常有前途的。
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引用次数: 6
Thermal Performance of a Vapor Chamber Heat Pipe with Diamond-Copper Composition Wick Structures 金刚石-铜复合芯结构蒸汽室热管的热性能
Ying-Tung Chen, J. Miao, Dau-Yuan Ning, Te-Feng Chu, Wei-En Chen
The vapor chamber heat pipe has the potential in the challenging areas to be employed as a heat spreader for cooling of high-performance microchips. This is due to not only the thickness of vapor chamber is in order of mm scale but also both the weight and the thermal resistance are less than the conventional copper heat spreaders. The operation principle of vapor chamber heat pipe is well understood and earlier studies show that the performance of vapor chamber strongly depends on the wick materials and structures. Conventional wick structure is made of sintered copper powers or base plate with micro-grooves, present work provide a novel wick design with various diamond-copper compositions to boost the effective thermal conductivity. There are three types of diamond-to-copper powder volume ratio as 1∶4, 1∶6 and 1∶8 considered in fabrication of the wick sheets and columns. An infra red (IR) thermal image camera is used to measure the steady and transient temperature distributions of the top evaporator surface of the vapor chamber by placing a single heat source with varied heat flux inputs. For performance comparison, the experimental measurements were also conducted on a solid copper block and an identical vapor chamber heat pipe with sintered copper powders of similar dimensions. Generally, the present wick material of diamond-copper composition can effectively prevent this shortcoming of dry out at high heat flux. Moreover, results also show that IR thermal imaging is a quick and effective technique for evaluating the thermal performance of vapor chamber heat pipe.
蒸汽室热管在具有挑战性的领域具有作为高性能微芯片冷却散热器的潜力。这不仅是因为蒸汽室的厚度在毫米量级,而且重量和热阻都比传统的铜散热器小。蒸汽室热管的工作原理已经很清楚,早期的研究表明,蒸汽室的性能在很大程度上取决于芯的材料和结构。传统的灯芯结构是由烧结铜粉或带微槽的基板制成的,本研究提出了一种采用不同金刚石-铜成分的新型灯芯设计,以提高有效导热系数。在灯芯片和灯芯柱的制作中,考虑了金刚石与铜粉的体积比分别为1∶4、1∶6和1∶8。利用红外热像仪测量了蒸汽室顶部蒸发器表面的稳态和瞬态温度分布。为了进行性能比较,还在一个固体铜块和一个相同尺寸的烧结铜粉蒸汽室热管上进行了实验测量。一般来说,目前的金刚石-铜复合芯材料可以有效地防止这一缺点,在高热流密度。研究结果还表明,红外热成像技术是一种快速有效的蒸汽室热管热性能评价方法。
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引用次数: 18
The development of high frequency induction heating embedded coil 开发高频感应加热埋管
Jung-Tang Huang, P. Lin, Po-Chin Lin, Kuo-Yu Lee, Hou-Jun Hsu
The miniaturization of components and systems has been progressing rapidly due to the developments in Micro-Electro-Mechanical (MEMS). The greatest advantage of micro injection molding is that it can massively produce micro-components rapidly with low-cost. Due to the poor flow capability of melting plastics into micro channel, and the additions of the engineering-plastics and fibers, it is difficult to inject the melted plastics into the cavities of the mold. In order to apply the microinjection technique in the fabrication of microfluidic chip, raising cavity surface temperature will be one of the solutions and reduce the cycle-time. High mold temperature not only improves the replication capacity of micro-structures but also effectively reduces molecular orientation. Therefore, developing systems for rapidly heating and cooling for injection of microfluidic chip is the main objective of this study. Numerical computations of eddy currents and heat conduction have been carried out by using the finite-element method (FEM). A simulation tool is also developed by integration of both thermal and electromagnetic analysis modules of ANSYS. Coil current, coil to plate distance and heating time are varied for both experiments and simulations. Several modifications, such as spacing in between coil turns, the distance of the workpiece and the coils, and dimensional parameters, are carried out. The capability and accuracy of simulations on the induction heating are verified from experiments, the simulated temperature distributions show reasonable agreement with measured results. To evaluate the feasibility and efficiency of induction heating on the mold surface temperature control. The size of mold plate heated by induction heating is 80×70×10 mm3. The mold plate can be rapidly heated from room temperature to about 120°C in 20 s. The simulation of the mold surface temperature with respect to time is consistent with measured results.
由于微机电技术(MEMS)的发展,元件和系统的小型化得到了迅速发展。微注射成型的最大优点是可以大规模、快速、低成本地生产微部件。由于熔融塑料在微通道内流动能力差,再加上工程塑料和纤维的加入,使熔融塑料难以注入模具腔内。为了将微注射技术应用于微流控芯片的制造,提高腔体表面温度,缩短循环时间是解决方法之一。高模温不仅提高了微结构的复制能力,而且有效地降低了分子取向。因此,开发用于微流控芯片注射的快速加热和冷却系统是本研究的主要目标。采用有限元法对涡流和热传导进行了数值计算。结合ANSYS的热分析模块和电磁分析模块,开发了仿真工具。线圈电流,线圈到板的距离和加热时间在实验和模拟中都是不同的。对线圈匝数间距、工件与线圈的距离、尺寸参数等进行了修改。通过实验验证了模拟的能力和准确性,模拟的温度分布与实测结果吻合较好。评价感应加热对模具表面温度控制的可行性和有效性。感应加热加热的模板尺寸为80×70×10 mm3。模板可在20秒内从室温快速加热到120℃左右。模具表面温度随时间的模拟结果与实测结果一致。
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引用次数: 1
Thermal characterization of high thermal conductive graphites reinforced aluminum matrix composites 高导热石墨增强铝基复合材料的热特性
Chih-Jong Chang, Chih-Hao Chang, Jen-Dong Hwang, C. Kuo
Due to the development of high power density and high heat flux of IC and LED components and devices, the thermal management of microelectronics has become a very critical issue in 3C and optoelectronic industries. This has lead to the requirement of high thermal performance materials and thermal modules. To enhance the thermal performance of current thermal modules, it is very important to develop advanced thermal management materials to replace the conventional monolithic metals. In this study some kinds of graphites reinforced aluminum matrix composites were developed. The effects of reinforcement types and its volume fraction on thermal properties such as thermal conductivity as well as the thermal expansion coefficient were studied. Moreover, their thermal performance such as heat spreading resistance and thermal resistance compared to pure aluminum and copper were also conducted. From the results, it showed that the thermal conductivity of graphite/Al composites can reach to 500~600 W/m.K in X-Y plane and 40~100 W/m.K in cross plane with thermal expansion less than 10 ppm/K and density less than 2.5 g/cc; The spreading resistance of this composite is 2~5% lower than the one of pure copper, and 25% lower than the one of pure aluminum.
由于IC和LED元器件和器件的高功率密度和高热流密度的发展,微电子器件的热管理已经成为3C和光电行业中非常关键的问题。这导致了对高热性能材料和热模块的需求。为了提高当前热模块的热性能,开发先进的热管理材料来取代传统的单片金属是非常重要的。本研究开发了几种石墨增强铝基复合材料。研究了增强材料类型及其体积分数对导热系数和热膨胀系数等热性能的影响。并对其导热性能进行了分析,如与纯铝和纯铜的导热性能比较。结果表明,石墨/铝复合材料的导热系数可达500~600 W/m。K在X-Y平面,40~100 W/m。横面K,热膨胀小于10ppm /K,密度小于2.5 g/cc;该复合材料的展布电阻比纯铜低2~5%,比纯铝低25%。
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引用次数: 3
Interfacial reactions of Sn-0.7Cu, Sn-58Bi and Sn-9Zn lead-free solders with the Au/Ni/SUS 304 substrate Sn-0.7Cu、Sn-58Bi和Sn-9Zn无铅焊料与Au/Ni/SUS 304衬底的界面反应
Kuen-da Chen, Hao Chen, Y. Yen
This study investigates the interfacial reactions between three kinds of lead-free solders, Sn-0.7 wt%Cu (SC), Sn-58 wt%Bi (SB) and Sn-9 wt%Zn (SZ), and Au/Ni/SUS 304 substrates. The reaction temperatures were at 240, 255 and 270 °C, and the reactions times were varied between 1 to 5 hours. According to experimental results, only the (Cu,Ni)6Sn5 phase was found in the SC/Au/Ni/SUS 304 couples. When the Ni layer was completely consumed, the massive spalling of the (Cu,Ni)6Sn5 phase was found in the solder. And then the FeSn2 phase was formed at the SUS 304 surface. Only the Ni3Sn4 phase was found at the SB/Au/Ni/SUS 304 interface. In the SZ/Au/Ni/SUS 304 couple, the Ni5Zn21 phase was formed at the interface. The thickness of the IMC in the SB/Au/Ni/SUS 304 and SZ/Au /Ni/SUS 304 couples increased with increasing the reaction time.
研究了三种无铅焊料Sn-0.7 wt%Cu (SC)、Sn-58 wt%Bi (SB)和Sn-9 wt%Zn (SZ)与Au/Ni/ sus304衬底之间的界面反应。反应温度为240℃、255℃和270℃,反应时间为1 ~ 5 h。实验结果表明,SC/Au/Ni/SUS 304合金中只存在(Cu,Ni)6Sn5相。当Ni层完全消耗后,钎料中(Cu,Ni)6Sn5相大量剥落。然后在sus304表面形成FeSn2相。在SB/Au/Ni/ sus304界面上只发现了Ni3Sn4相。在SZ/Au/Ni/ sus304偶联中,在界面处形成Ni5Zn21相。随着反应时间的延长,SB/Au/Ni/ sus304和SZ/Au /Ni/ sus304合金的IMC厚度增加。
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引用次数: 0
期刊
2009 4th International Microsystems, Packaging, Assembly and Circuits Technology Conference
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