N. Y. Firsova, E. Mishina, S. Senkevich, I. P. Pronin, I. Bdikin, A. Kholkin
{"title":"Femtosecond infrared laser annealing of ferroelectric PZT films on a metal substrate","authors":"N. Y. Firsova, E. Mishina, S. Senkevich, I. P. Pronin, I. Bdikin, A. Kholkin","doi":"10.1109/ISAF.2012.6297852","DOIUrl":null,"url":null,"abstract":"Ti-sapphire femtosecond laser was utilized to crystallize Pb(Zr0,54, Ti0,46)O3 (PZT) film on platinized silicon substrate. Second harmonic generation was used to in-situ monitor of the annealing process and to confirm a non-centrosymmetric perovskite ferroelectric phase of the irradiated area. Piezo-force microscopy technique allowed us to investigate local polarization properties of annealed areas.","PeriodicalId":20497,"journal":{"name":"Proceedings of ISAF-ECAPD-PFM 2012","volume":"107 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISAF-ECAPD-PFM 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2012.6297852","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Ti-sapphire femtosecond laser was utilized to crystallize Pb(Zr0,54, Ti0,46)O3 (PZT) film on platinized silicon substrate. Second harmonic generation was used to in-situ monitor of the annealing process and to confirm a non-centrosymmetric perovskite ferroelectric phase of the irradiated area. Piezo-force microscopy technique allowed us to investigate local polarization properties of annealed areas.
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