{"title":"Microstructure and optical properties of sputter-deposited Ga2O3 films","authors":"Eduardo Vega, S. Isukapati, T. Oder","doi":"10.1116/6.0000938","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17571,"journal":{"name":"Journal of Vacuum Science and Technology","volume":"112 1","pages":"033412"},"PeriodicalIF":0.0000,"publicationDate":"2021-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0000938","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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