F. Vidimari, S. Pellegrino, M. Caldironi, A. Di Paola, R. Chen
{"title":"High resistivity layers in InP obtained by Co or Fe ion implantation and LPE regrowth","authors":"F. Vidimari, S. Pellegrino, M. Caldironi, A. Di Paola, R. Chen","doi":"10.1109/ICIPRM.1991.147422","DOIUrl":null,"url":null,"abstract":"The possibility of obtaining semiinsulating buried layers in InP by Co or Fe ion implantation and subsequent epitaxial regrowth is discussed. Electrical characteristics measurements of Fe and Co implanted InP indicate resistivities in excess of 10/sup 7/ Omega -cm critical voltages of 2.5 V, and current densities as low as 20 mA/cm/sup 2/ at critical voltage.<<ETX>>","PeriodicalId":6444,"journal":{"name":"[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials","volume":"29 1","pages":"500-503"},"PeriodicalIF":0.0000,"publicationDate":"1991-04-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.1991.147422","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The possibility of obtaining semiinsulating buried layers in InP by Co or Fe ion implantation and subsequent epitaxial regrowth is discussed. Electrical characteristics measurements of Fe and Co implanted InP indicate resistivities in excess of 10/sup 7/ Omega -cm critical voltages of 2.5 V, and current densities as low as 20 mA/cm/sup 2/ at critical voltage.<>
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