C. Cereignani, A. Frangi, S. Lorenzani, A. Frezzotti
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引用次数: 0
Abstract
A three-dimensional quasi-static Stokes model, with a correction based on the kinetic theory of rarefied gas, is used to evaluate the damping forces exerted by gas flows on the moving surfaces of micromechanical structures in a wide range of pressures. Numerical results arc compared with the experimental data collected on a silicon biaxial accelerometer in the continuum and transitional flow regimes
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